Mr. Gabriele Lorenzi
Plant Manager at Rial Vacuum Spa
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 15, 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Microscopes, Polishing, Scattering, Particles, Crystals, Silicon, Inspection, Semiconducting wafers, Surface finishing, Classification systems

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