Gaku Tsuchibuchi
at Taiyo Nippon Sanso Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Optical lithography, Titanium dioxide, Etching, Metals, Resistance, Atomic layer deposition, Aluminum, Wet etching, Ozone

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top