Galen P. Miley
at Northwestern Univ.
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Stereoscopy, Reflectometry, Extreme ultraviolet, 3D image processing

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Coherence imaging, Cameras, Stereoscopy, Silicon, Reflectivity, Reflectometry, Profiling, 3D metrology, Extreme ultraviolet, 3D image processing

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Microscopes, Diffraction, Mirrors, Detection and tracking algorithms, Sensors, Image resolution, Image transmission, Extreme ultraviolet, Reconstruction algorithms, Spatial resolution

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