This paper advances a kind of micro spectrometer, which is based upon Fabry-Perot antrum's character of filtering the waves. The basic structure of the micro spectrometer is the array of
Fabry-Perot antrum which contains many different length of antrum on the substrate of silicon, consequently we can achieve the detector for several wavelengths simultaneously. The unit of probing
is a Fabry-Perot antrum, which is made up of the substrate of silicon--metal film--silicon dioxide layer-- metal film. We carried out the corresponding simulation. In the basic structure of aluminum film(14nm)- silicon dioxide layer - silver film(39nm), the resolution can reach 15nm. When the area of a unit of probing is 0.14mm x 0.14mm only, it can reach the luminous flux of miniature grating spectrum instrument(the minimum volume in the order of cm),but the volume of the part of spectrum detector is only the order of mm. The design size of the micro spectrometer is in a few millimeters. Furthermore it has no movable parts and could detect several wavelengths at the same time. It is possible to fabricate such micro spectrometer through existing process methods of IC technology.
Our recent progress on the miniature bio-chemical analytical system is introduced in this paper. Experiments have been carried out to test the performance of our system. During these experiments, the absorption spectrums of different materials were obtained, which included NaNO2, protein, blood, Fe2+ ion and several medicine solutions. Comparison experiments were also adopted to compare the performance of the system with that of some exiting BCAS, such as the Shimaudzu UV-240 spectrometer and Australia GBC spectrometer. The results show that the experimental datum is compatible. Quantitative experiment is carried out by using the Fe2+ ion solutions with different concentration and the working curve of such ion is obtained which show that it is compatible with the Low of Lambert-Beer. All these show that the system can meet the requirement of practical use. Our research is one of the explorations to make the conventional analytical system portable by using the technology of MOEMS.
In some implanted and distributed system, the power consume of these devices is tiny (generally just at uW level), and effective, long term, power supplier are lacking. For this need, several forms of vibration-driven MEMS micro generator are possible and are reported in the literature, with potential application areas including distributed sensing and ubiquitous. Our goal is to develop a micro power source translating the ambient vibration energy into the electric power which can offer 30uW power to some sensors. In our work, we designed the power generator based on a charge induced by a electret transported between two parallel capacitors. It consists of combed in-plane capacitor, electret and selenium rectifier. The combed in-plane capacitor is the key part of the generator; it will fulfill the charge transportation and translation of the energy. We design the structure of the capacitor and simulate the amplitude-frequency characteristic and phase-frequency characteristic. And then the electric-mechanic coupling is simulated, and we know the relationship between output voltage, power density and frequency. Finally a micro power generator is designed and its dimension is 8000*3000um.When the exterior oscillation is 10um and the load is 1e-6ohm, the output power is 30uW and the voltage is 4.1V.
By combining silicon dry corrosion, wet corrosion, oxidizing sharpening and vacuum bonding techniques, and the theoretic calculation of elastic membranes and the distance from the catelectrode to the anode, a novel vacuum microelectronic pressure senor with overload protection is developed. The density of the field emission catelectrode array is about 24,000/mm2. The starting emission voltage is 0.5 to 1.5 V; backward voltage is higher than 25 V. When the forward voltage is 5 V, pressure sensitivity is 30.1 mV/kPa. The temperature error is 0.5% between 20 and 122°C.
A scheme of a novel hybrid integrated microspectrometer is proposed, which greatly reduces the number of optical units used in the system and easily realizes the integration of the optical unit and the detecting array. At the same time, the effective area of the grating increases. One model of such device is fabricated. Its volume is about 60×40×40 mm and the volume can be further reduced. In the experiments, the spectrum signal of a Hg lamp is obtained. The results show that a resolution of 7 nm is achieved when a single mode fiber is used as the light input device.
A scheme of a novel hybrid integrated micro spectrometer is proposed, which greatly reduces the number of optical units used in the system and can easily realize the integration of the optical unit and the detecting array. At the same time, the effective area of the grating is increased. One model of such device is fabricated. It is about 60mm×40mm×40mm and the volume can be further reduced. In experiments, the spectrum signal of Hg lamp and tungsten lamp is obtained. The result shows that a resolution of 7nm is achieved when a single mode fiber is used as the light input device.