Dr. Gang Li
at Xiamen Univ
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Switches, Capacitors, Dielectrics, Ions, Silicon, Reliability, Silicon films, Ion implantation, Low pressure chemical vapor deposition

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Switches, Capacitors, Metals, Dielectrics, Silicon, Reliability, Capacitance, Bridges, Aluminum

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Switches, Silica, Metals, Composites, Dielectrics, Silicon, Silicon films, Capacitance, Plasma enhanced chemical vapor deposition

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Switches, Electrodes, Metals, Dielectrics, Interfaces, Ions, Silicon, Bridges, Ion implantation

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