Dr. Gang Sun
Department Manager at Shanghai Micro Electronics Equipment Co Ltd
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | April 11, 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Projection systems, Lithography, Optical components, Optimization (mathematics), Thermal modeling, Refractive index, Photomasks, Optical design, Lithographic illumination, Thermography

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Data modeling, Manufacturing, Particle filters, Projection systems, Semiconducting wafers, Thermal modeling

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Optical components, Lithography, Refractive index, Optical design, Optical lithography, Silica, Wavefront aberrations, Lens design, Thermal analysis, Photomasks, Thermal modeling

PROCEEDINGS ARTICLE | July 14, 2015
Proc. SPIE. 9532, Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers
KEYWORDS: Annealing, Silicon, Laser applications, Semiconductor lasers, Field effect transistors, Semiconducting wafers, Pulsed laser operation, Temperature metrology, Laser systems engineering, Absorption

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Reticles, Scanners, Process control, Photomasks, Critical dimension metrology, Semiconducting wafers, Binary data, Overlay metrology, Phase shifts

PROCEEDINGS ARTICLE | March 13, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Metrology, Data modeling, Control systems, Time metrology, Process control, Software development, Source mask optimization, Optical alignment, Semiconducting wafers, Overlay metrology

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top