The traceability of cleanness parameter has received high attention from the metrology industry of light-scattering airborne particle counter. Based on the metrology method of the big particle concentration and the traceability method of airborne particle counter’s counting performance on small particle size by statistical analysis, this paper tries to build a coordinate system of the particles distribution on anodic aluminum oxide (AAO) membrane through the counter, choose the statistical samples by aerodynamics, observe these samples on membrane by field emission scanning electron microscope (FESEM), evaluate the uncertainty of measurement on standard particle statistics, analyze the uncertainty range and the key affecting factor, and put forward a method of improving statistics accuracy in process control. The test results prove that the method has important value on improvement of the theory of the cleanness traceability system based on FESEM and statistical analysis.
The traceability of light-scattering airborne particle counter’s counting performance has received more attention, but has failed to settle internationally. This paper puts forward a traceability method of light-scattering airborne particle counter’s counting performance on single particle size, based on Anodic Aluminum Oxide (AAO) template andScanning Electron Microscope (SEM), by reforming the traditional standard airborne particle counter, building a measurement system including AAO and SEM, and utilizing the method of statistical physics in data processing to obtain more accurate measurement results. According to the actual test results and its uncertainty analysis, the traceability method of light-scattering airborne particle counter’s counting performance based on AAO and SEM makes sense in theory, and has certain research value on a solution to the traceability problem of light-scattering airborne particle counter internationally.