Dr. Gaobin Xu
at Hefei Univ of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 September 2002
Proc. SPIE. 4928, MEMS/MOEMS Technologies and Applications
KEYWORDS: Thin films, Silicon, Silicon films, Low pressure chemical vapor deposition, Micromachining, Convection, Thermal modeling, Polysomnography, Surface micromachining, Temperature metrology

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