Garand T. Tyson
at
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 8 March 2019
Proc. SPIE. 10919, Oxide-based Materials and Devices X
KEYWORDS: Fabrication, Refractive index, Silica, Water, Dielectrics, Chemical vapor deposition, Spectroscopic ellipsometry, Atomic layer deposition, Zinc oxide, Nanolithography

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