Garrett Standley
at Freescale Semiconductor Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Optical lithography, Deep ultraviolet, Error analysis, Silicon, Control systems, Telecommunications, Data communications, Photoresist processing, Semiconducting wafers, Signal detection

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Deep ultraviolet, Particles, Error analysis, Silicon, Manufacturing, Control systems, Photoresist materials, Telecommunications, Data communications, Semiconducting wafers

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