Dr. Garth C. Robins
Sr Optical Engineer at Lockheed Martin Advanced Technology Ctr
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 11 July 2008 Paper
Proc. SPIE. 7017, Modeling, Systems Engineering, and Project Management for Astronomy III
KEYWORDS: Actuators, Mirrors, Wavefronts, Control systems, Optical testing, Collimators, Space telescopes, Integrated optics, Vibration isolation, Secondary tip-tilt mirrors

Proceedings Article | 23 June 2006 Paper
Proc. SPIE. 6271, Modeling, Systems Engineering, and Project Management for Astronomy II
KEYWORDS: Telescopes, Coherence imaging, Coherence (optics), Imaging systems, Scattering, Fourier transforms, Monte Carlo methods, Solids, Diffusers, Modulation transfer functions

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Reticles, Polarization, Etching, Scanning electron microscopy, Photomasks, Charge-coupled devices, Mask making, Semiconducting wafers, Electromagnetism, Phase shifts

Proceedings Article | 6 December 2004 Paper
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Monochromatic aberrations, Polarization, Imaging systems, Scanning electron microscopy, Photoresist materials, Photomasks, Semiconducting wafers, Electromagnetism, Phase shifts

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Target detection, Monochromatic aberrations, Scanners, Interferometry, Scanning electron microscopy, Printing, Photomasks, Spherical lenses, Semiconducting wafers, Phase shifts

Showing 5 of 12 publications
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