Dr. Gary S. Calabrese
VP & CTO at Rohm and Haas Electronic Materials, LLC
SPIE Involvement:
Publications (6)

SPIE Journal Paper | 1 October 1993
Edward Pavelchek, Gary Calabrese, John Bohland, Bruce Dudley, Susan Jones, Peter Freeman
OE, Vol. 32, Issue 10, (October 1993) https://doi.org/10.1117/12.10.1117/12.146858
KEYWORDS: Silicon, Semiconducting wafers, Photoresist processing, Scanning electron microscopy, Reactive ion etching, Etching, Deep ultraviolet, Image processing, Glasses, Manufacturing

Proceedings Article | 15 September 1993 Paper
Edward Pavelchek, Gary Calabrese, Bruce Dudley, Susan Jones, Peter Freeman, John Bohland, Roger Sinta
Proceedings Volume 1925, (1993) https://doi.org/10.1117/12.154760
KEYWORDS: Silicon, Photoresist processing, Semiconducting wafers, Scanning electron microscopy, Reactive ion etching, Etching, Manufacturing, Image processing, Very large scale integration, Deep ultraviolet

Proceedings Article | 1 June 1992 Paper
Susan Jones, Peter Freeman, Edward Pavelchek, John Bohland, Bruce Dudley, Gary Calabrese
Proceedings Volume 1673, (1992) https://doi.org/10.1117/12.59843
KEYWORDS: Silicon, Process control, Photoresist processing, Plasma, Scanning electron microscopy, Image processing, Integrated circuits, Metrology, Inspection, Semiconducting wafers

Proceedings Article | 1 July 1991 Paper
Eytan Barouch, Uwe Hollerbach, Steven Orszag, Mary Allen, Gary Calabrese
Proceedings Volume 1463, (1991) https://doi.org/10.1117/12.44793
KEYWORDS: Photoresist materials, Diffusion, Computer simulations, Absorption, Image processing, Optical lithography, Photomicroscopy, Chemical elements, Numerical analysis, Systems modeling

Proceedings Article | 1 June 1991 Paper
Gary Calabrese, Livingstone Abali, John Bohland, Edward Pavelchek, Prasit Sricharoenchaikit, Gerald Vizvary, Stephen Bobbio, Patrick Smith
Proceedings Volume 1466, (1991) https://doi.org/10.1117/12.46401
KEYWORDS: Photoresist materials, Etching, Nickel, Photoresist developing, Metals, Aluminum, Printing, Plasma etching, Transmission electron microscopy, Palladium

Showing 5 of 6 publications
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