Mr. Gary Dean Gray
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
KEYWORDS: Microelectromechanical systems, Actuators, Gold, Capacitors, Electrodes, Dielectrics, Capacitance, Distance measurement, Beam shaping, Instrument modeling

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