Mr. Gary O'Brien Profile

Gary O'Brien

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Publications (2)

Proceedings Article | 21 November 2001 Paper

Submicron high-aspect-ratio silicon beam etch

Gary O'Brien, David Monk, Khalil Najafi

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448983

KEYWORDS: Etching, Silicon, Statistical modeling, Reactive ion etching, Fluorine, Diffractive optical elements, Ions, Chemistry, Semiconducting wafers, Oxides

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Proceedings Article | 19 November 2001 Paper

MEMS cantilever beam electrostatic pull-in model

Gary O'Brien, David Monk, Liwei Lin

Proceedings Volume 4593, (2001) https://doi.org/10.1117/12.448834

KEYWORDS: Capacitance, Neodymium, Electrodes, Microelectromechanical systems, Beam splitters, Actuators, Computer simulations, Electromechanical design, Dielectrics, Image segmentation

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