Gary O'Brien
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 November 2001
Proc. SPIE. 4592, Device and Process Technologies for MEMS and Microelectronics II
KEYWORDS: Oxides, Diffractive optical elements, Etching, Ions, Silicon, Chemistry, Reactive ion etching, Fluorine, Semiconducting wafers, Statistical modeling

Proceedings Article | 19 November 2001
Proc. SPIE. 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II
KEYWORDS: Microelectromechanical systems, Actuators, Beam splitters, Electrodes, Image segmentation, Dielectrics, Computer simulations, Capacitance, Neodymium, Electromechanical design

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