Mr. Gary J. Pangelina
at Centrotherm Thermal Solutions
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Gold, Oxides, Electronics, Metals, Silicon, Reliability, Microelectronics, Chemical elements, Yield improvement

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