Dr. Gautam Gunjala Profile

Dr. Gautam Gunjala

Optical Engineer at ASML

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Publications (4)

Proceedings Article | 27 April 2023 Presentation + Paper

Alignment and overlay through opaque metal layers

V. Blanco Carballo, E. Canga, C. Jehoul, A. Moussa, A. Tamaddon, C. Tabery, G. Gunjala, B. Menchtchikov, V. Zacca, S. Lalbahadoersing, A. den Boef, R. Synowicki

Proceedings Volume 12496, 124960I (2023) https://doi.org/10.1117/12.2658084

KEYWORDS: Ruthenium, Optical alignment, Semiconducting wafers, Overlay metrology, Oxides, Silicon, Metals, Etching, Scanners, Copper

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Proceedings Article | 1 June 2018 Presentation + Paper

Speckle metrology for extreme ultra-violet lithography

A. Shanker, L. Waller, G. Gunjala, A. Wojdyla, D. Voronov, P. Naulleau

Proceedings Volume 10583, 105830T (2018) https://doi.org/10.1117/12.2299605

KEYWORDS: Speckle, Photoresist materials, Extreme ultraviolet lithography, Stochastic processes, Extreme ultraviolet, Fractal analysis, EUV optics, Atomic force microscopy, Line edge roughness, Image processing

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Proceedings Article | 25 March 2016 Presentation + Paper

Optical transfer function characterization using a weak diffuser

Gautam Gunjala, Aamod Shanker, Volker Jaedicke, Nick Antipa, Laura Waller

Proceedings Volume 9713, 971315 (2016) https://doi.org/10.1117/12.2213271

KEYWORDS: Diffusers, Speckle, Optical transfer functions, Cameras, Holography, Fourier transforms, Microscopes, Scattering, Imaging systems, Spatial frequencies

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Proceedings Article | 26 September 2013 Paper

Performance characteristics of atomic layer functionalized microchannel plates

O. H. Siegmund, N. Richner, G. Gunjala, J. McPhate, A. Tremsin, H. Frisch, J. Elam, A. Mane, R. Wagner, C. Craven, M. Minot

Proceedings Volume 8859, 88590Y (2013) https://doi.org/10.1117/12.2024919

KEYWORDS: Microchannel plates, Atomic layer deposition, Ultraviolet radiation, Sensors, Glasses, Modulation, Distortion, Lead glass, Borosilicate glass, Resistance

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