Dr. Gavin C. Rider
Vice President/Technology & Development
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | 27 April 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Reticles, Semiconductors, Sensors, Microelectronics, Manufacturing, Air contamination, Semiconductor manufacturing, Metals, Semiconducting wafers, Electric field sensors

SPIE Journal Paper | 5 April 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Reticles, Nanolithography, Semiconductors, Metals, Sensors, Dielectrics, Quartz, Semiconductor manufacturing, Ionization, Electronic components

Proceedings Article | 8 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Reticles, Semiconductors, Electronic components, Sensors, Ionization, Standards development, Glasses, Electric field sensors, Semiconductor manufacturing, Manufacturing

Proceedings Article | 11 May 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Reticles, Quartz, Control systems, Calibration, Semiconductors, Sensors, Glasses, Clocks, Data analysis, Capacitors

Proceedings Article | 17 October 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Reticles, Semiconductors, Atomic force microscopy, Photomasks, Lithography, Quartz, Sensors, Inspection, Manufacturing, Composites

Showing 5 of 6 publications
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