Dr. Geert Mannaert
at imec
SPIE Involvement:
Author
Publications (7)

SPIE Journal Paper | 10 October 2019
JM3 Vol. 18 Issue 04
KEYWORDS: Bridges, Annealing, Directed self assembly, Data modeling, Etching, Scanning electron microscopy, Polymethylmethacrylate, Picosecond phenomena, Wet etching, Optical inspection

Proceedings Article | 25 March 2019 Presentation + Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Optical lithography, Silicon

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Polymethylmethacrylate, Etching, Annealing, Silicon, Scanning electron microscopy, Optical inspection, Bridges, Directed self assembly, Wet etching, Defect inspection

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Fin field effect transistors, Germanium, Gallium arsenide, Gallium nitride, Field effect transistors, CMOS technology, Group III-V semiconductors

Proceedings Article | 22 March 2018 Paper
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Etching, Dry etching, Silicon, Chemistry, Scanning electron microscopy, Directed self assembly, Line edge roughness, Reactive ion etching, Semiconducting wafers

Showing 5 of 7 publications
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