Dr. Genevieve A. Kane Profile

Dr. Genevieve A. Kane

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Proceedings Article | 30 April 2023 Presentation

Measurement and analysis of variations in via measurements using critical dimension scanning electron microscopes and e-beam massive metrology techniques

Genevieve Kane, Jennifer Church, Connor Franzese, Chris Mack, Cody Murray, Luciana Meli

Proceedings Volume 12496, 124960V (2023) https://doi.org/10.1117/12.2657650

KEYWORDS: Metrology, Scanning electron microscopy, Electron microscopes, Extreme ultraviolet, Time metrology, Stochastic processes, Statistical analysis, Critical dimension metrology, Inspection

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