Geng Yang
at Univ of Central Florida
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Lithography, Polymers, Control systems, 3D printing, Polymerization, Nanophotonics, Photopolymers, Integrated photonics, Multiphoton lithography, Absorption

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