Results of investigations of the equilibrium 1/fφ noise and non-linearity of the current-voltage characteristics (CVC) of thin metal films and different type of contacts are presented. Contacts metal-metal, contacts of Ta film-based resistors, ohmic contacts to semiconductor, and micro-welded contacts of Cu film-gold wire were studied. The experiments were conducted under the DC, and AC current, and under the influence of series short rectangular current pulses. The theoretical substantiation of experimental results is give here. The use of equilibrium and non-equilibrium 1/fφ noise and non-linearity of CVC for nondestructive quality control of thin-film conductors, film resistors, different type contacts, which determines reliability of integrated circuits, large-scale integrated circuits (LSICs) and modern electronic devices with long terms of active functioning, is presented. The levels of second harmonic of contacts and third harmonic of resistive film are sensitive parameters of the film resistors quality. LSICs with a high level of current fluctuations in the supply circuit, observed in the static mode, contain local latent defects such as ohmic contact fault in contact windows, break of metallization on a step of oxide, Al-film degradation due to electrocorrosion or EM damages, etc.