Dr. Georg Aigeldinger
Dir of Process Engg
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 20 April 2017
Proc. SPIE. 10123, Novel In-Plane Semiconductor Lasers XVI
KEYWORDS: Light sources, Semiconductor lasers, Gallium nitride, Indium gallium nitride, Current controlled current source

Proceedings Article | 15 January 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Polishing, Titanium, Polymethylmethacrylate, Metals, Glasses, X-rays, Nickel, Silver, Photomasks, Optical alignment

Proceedings Article | 15 January 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Lithography, Polymethylmethacrylate, Ultraviolet radiation, X-rays, Nickel, Photoresist processing, Electroplating, X-ray lithography, 3D microstructuring

Proceedings Article | 28 September 2001
Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII
KEYWORDS: Optical lithography, Polymethylmethacrylate, Scanners, X-rays, Surface roughness, Scanning electron microscopy, Photomasks, Beryllium, X-ray lithography, Temperature metrology

Proceedings Article | 11 August 2000
Proc. SPIE. 4175, Materials and Device Characterization in Micromachining III
KEYWORDS: Gold, Titanium, Optical lithography, Polymethylmethacrylate, X-rays, Nickel, Silicon, Photomasks, Photoresist processing, X-ray lithography

Showing 5 of 6 publications
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