Dr. Georg S. Duesberg
at Infineon Technologies AG
SPIE Involvement:
Conference Program Committee | Author
Publications (1)

PROCEEDINGS ARTICLE | April 29, 2003
Proc. SPIE. 5118, Nanotechnology
KEYWORDS: Optical lithography, Particles, Silicon, Chemical vapor deposition, Scanning electron microscopy, Transmission electron microscopy, Microelectronics, Transistors, Silicon carbide, Carbon nanotubes

Conference Committee Involvement (1)
Nanotechnology
19 May 2003 | Maspalomas, Gran Canaria, Canary Islands, Spain
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