Dr. Georg Soumagne
SPIE Involvement:
Author
Publications (37)

Proceedings Article | 21 September 2020 Poster + Presentation
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Mirrors, Light sources, Chemical species, Hydrogen, Reflectivity, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Pulsed laser operation, Tin

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Semiconductors, Mirrors, Light sources, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Magnetic semiconductors, Tin

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Mirrors, Light sources, Laser development, Reflectivity, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Light sources, Extreme ultraviolet

Proceedings Article | 26 September 2019 Presentation + Paper
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Semiconductors, Mirrors, Reflectivity

Showing 5 of 37 publications
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