Dr. George Patrick Watson
at Nokia Bell Labs
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 15 May 2007
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Microelectromechanical systems, Mirrors, Modulation, Etching, Electrodes, Resistance, Wavefronts, Spatial light modulators, Maskless lithography, Semiconducting wafers

Proceedings Article | 5 July 2000
Proc. SPIE. 4000, Optical Microlithography XIII
KEYWORDS: Lithography, Manufacturing, Printing, Photoresist materials, Microelectronics, Photomasks, Integrated circuits, Critical dimension metrology, Binary data, Phase shifts

Proceedings Article | 23 June 2000
Proc. SPIE. 3999, Advances in Resist Technology and Processing XVII
KEYWORDS: Lithography, FT-IR spectroscopy, Data modeling, Polymers, Interfaces, Diffusion, Absorbance, Semiconducting wafers, Photolysis, Chemically amplified resists

Proceedings Article | 26 July 1999
Proc. SPIE. 3679, Optical Microlithography XII
KEYWORDS: Lithography, Lithographic illumination, Computer simulations, Scanning electron microscopy, Photomasks, Optical proximity correction, SRAF, Critical dimension metrology, Tolerancing, Environmental sensing

Proceedings Article | 26 July 1999
Proc. SPIE. 3679, Optical Microlithography XII
KEYWORDS: Oxides, Lithography, Lithographic illumination, Etching, Scanning electron microscopy, Printing, SRAF, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Showing 5 of 15 publications
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