Dr. George A. Antonelli
Senior Technologist at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 11, 2012
Proc. SPIE. 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
KEYWORDS: Semiconductors, Thin films, Metrology, Scattering, Metals, Dielectrics, Light scattering, Atomic force microscopy, Acoustics, Standards development

PROCEEDINGS ARTICLE | March 17, 2012
Proc. SPIE. 8328, Advanced Etch Technology for Nanopatterning
KEYWORDS: Ultraviolet radiation, Dielectrics, Ions, Silicon, Nitrogen, Oxygen, Synchrotrons, Vacuum ultraviolet, Plasma systems, Plasma

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