George Damas
at ASML
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 1, 1991
Proc. SPIE. 1544, Miniature and Micro-Optics: Fabrication and System Applications
KEYWORDS: Diffraction, Interferometers, Sensors, Calibration, Wavefront sensors, Wavefronts, Charge-coupled devices, Reconstruction algorithms, Wavefront reconstruction, Optical arrays

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