George Petricich
at DNS Electronics LLC
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 16 June 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Liquids, Etching, Single crystal X-ray diffraction, Photoresist processing, Plasma etching, Lithography, Capillaries, Carbon dioxide, Projection lithography, Semiconducting wafers

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