Dr. George Vakanas
at Intel Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Image processing, Inspection, Photomasks, Optical proximity correction, SRAF, Computer aided design, Binary data, Model-based design, Resolution enhancement technologies, Defect inspection

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