Dr. Georgeta Masson
at SpectraWatt Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 23 March 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Lithography, Optical lithography, Polymers, Metals, Silicon, Cobalt, Scanning electron microscopy, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography

Proceedings Article | 23 March 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Thin films, Lithography, Electron beam lithography, Magnesium, Polymers, Photoresist materials, Polymerization, Extreme ultraviolet, Extreme ultraviolet lithography, Temperature metrology

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Near ultraviolet, Optical lithography, Molecules, Manufacturing, Xenon, Absorbance, Semiconducting wafers, 193nm lithography, Absorption

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