Ger Folkersma
PhD at Univ of Twente
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | December 10, 2014
OE Vol. 53 Issue 12
KEYWORDS: Actuators, 3D modeling, Finite element methods, Temperature metrology, Pulsed laser operation, Thermal modeling, Electroluminescence, Optical alignment, Sensors

PROCEEDINGS ARTICLE | March 6, 2014
Proc. SPIE. 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX
KEYWORDS: Actuators, Polishing, Sensors, 3D modeling, Finite element methods, Bridges, Motion models, Pulsed laser operation, Temperature metrology, Absorption

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