Dr. Gerald A. Dicks
at Univ of Wisconsin Madison
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 21 June 2006
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Reticles, Data modeling, Glasses, Particles, 3D modeling, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Zerodur, Thermal modeling

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Electron beam lithography, Metrology, Etching, Image processing, 3D modeling, Photomasks, Mask making, Picosecond phenomena, Silicon carbide, Projection lithography

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Optical lithography, Electrodes, Dielectrics, Interferometry, 3D modeling, Capacitance, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Computational fluid dynamics, Lithography, Quartz, Capillaries, Silicon, Computer simulations, Nanoimprint lithography, Fluid dynamics, Liquids, Absorption

Proceedings Article | 2 June 2004
Proc. SPIE. 5504, 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Wafer-level optics, Refractive index, Microfluidics, Polymers, Refraction, Optical simulations, Immersion lithography, Semiconducting wafers, Liquids, Absorption

Showing 5 of 10 publications
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