Prof. Gerald Fütterer Profile

Prof. Gerald Fütterer

Professor at Technische Hochschule Deggendorf

SPIE Involvement:

Conference Program Committee | Author

Publications (13)

PROCEEDINGS ARTICLE | October 16, 2017

Tailored complex degree of mutual coherence for plane-of-interest interferometry with reduced measurement uncertainty

Proc. SPIE. 10448, Optifab 2017

KEYWORDS: Light sources, Modulation, Polarization, Reflection, Interferometers, Sensors, Reflectivity, Interferometry, Spatial coherence, Fizeau interferometers, Diffraction gratings

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PROCEEDINGS ARTICLE | June 15, 2017

Polarization-Fizeau interferometer enabling phase measurement with reduced uncertainty

Proc. SPIE. 10326, Fourth European Seminar on Precision Optics Manufacturing

KEYWORDS: Beam splitters, Phase shifting, Optical spheres, Modulation, Polarization, Reflection, Interferometers, Sensors, Reflectivity, Interferometry, Wavefronts, Phase measurement, Phase shifts, Fizeau interferometers

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PROCEEDINGS ARTICLE | November 11, 2016

Field lens multiplexing in holographic 3D displays by using Bragg diffraction based volume gratings

Proc. SPIE. 10151, Optics and Measurement International Conference 2016

KEYWORDS: Diffraction, Holography, Modulation, Multiplexing, Lens design, Spatial light modulators, Collimation, Liquid crystals, 3D displays, Diffraction gratings

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PROCEEDINGS ARTICLE | June 30, 2016

From holographic displays to volume gratings and off-axis parabolic mirrors

Proc. SPIE. 10009, Third European Seminar on Precision Optics Manufacturing

KEYWORDS: Diffraction, Mirrors, Holography, Data modeling, Modulation, 3D modeling, Collimation, 3D displays, Off axis mirrors, Diffraction gratings

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PROCEEDINGS ARTICLE | May 15, 2010

Depth cues in human visual perception and their realization in 3D displays

Proc. SPIE. 7690, Three-Dimensional Imaging, Visualization, and Display 2010 and Display Technologies and Applications for Defense, Security, and Avionics IV

KEYWORDS: Eye, Holography, Visualization, Cameras, 3D displays, Stereoscopic displays, 3D visualizations, Integral imaging, 3D image processing, 3D volumetric displays

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PROCEEDINGS ARTICLE | January 29, 2008

Full-color interactive holographic projection system for large 3D scene reconstruction

Proc. SPIE. 6911, Emerging Liquid Crystal Technologies III

KEYWORDS: Mirrors, Light sources, Eye, Holograms, Holography, Modulators, Spatial light modulators, Projection systems, 3D displays, Prototyping

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PROCEEDINGS ARTICLE | June 18, 2007

Simulation of the detectors response of an autocollimator

Proc. SPIE. 6617, Modeling Aspects in Optical Metrology

KEYWORDS: Diffraction, Point spread functions, Reticles, Light emitting diodes, Modulation, Sensors, Autocollimators, Charge-coupled devices, CCD image sensors, Signal detection

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PROCEEDINGS ARTICLE | August 27, 2005

Uncertainty analysis for phase measurement on PSM with a 193nm common-path shearing interferometer

Proc. SPIE. 5858, Nano- and Micro-Metrology

KEYWORDS: Light sources, Phase shifting, Interferometers, Sensors, Wavefronts, Wave propagation, Phase measurement, Prototyping, Phase shifts, Shearing interferometers

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Scaling down the critical dimension (CD) also requires a reduction of systematic and stochastic errors in the measurement of phase shifts introduced by phase shift masks (PSM). Furthermore, in current mask design all degrees of freedom are used to satisfy the requirements and consequently different types like attenuated or alternate PSM are in use. A direct measurement of the introduced phase shift - the wave field propagating from the mask - is mandatory to further reduce the CD error budget. Although different interferometer set-ups might be used, a common path design enables a high repeatability of the measured phase values by being less sensitive to vibrations and air turbulence. Furthermore systematic errors due to different optical aberrations present in different arms of an interferometer are eliminated. A lateral shearing interferometer was realized by adding two phase gratings and one amplitude grating to a microscope working in transmission. Thus a very stable tool for the measurement of phase shifting structures at λ = 193nm was obtained. The repeatability of the phase measurement is less than 2π/1300. A simple evaluation can be used if the lateral restricted phase shifting region is doubled, i.e. the phase ridge is compared with a neutral surrounding area. This situation of a totally sheared object is obtained if the amount of the shear s is larger than the object's lateral distance d. Moreover, this method provides a larger number of measured phase values compared to the case of differential phase contrast. To reduce the contribution of the visibility to the uncertainty budget the spatial degree of coherence was tailored to obtain a visibility V > 0,8 even at large shear distances. The 5-phase algorithm was used to introduce the reference phase steps Δφ_i. A model based description of the measurement was made. The uncertainty of the measured phase value of the introduced interferometer is |Δφmax| = 2π/330 if an optimal alignment of the system is achieved. This value can be reduced by a factor of 2 if the dependence of the phase shifting algorithm on the measured phase value is taken into account. A further reduction can be obtained if an intensity monitoring is implemented. Measurements performed at different adjustment states are given to discuss e.g. the influence of the adjustment of the two phase gratings on the uncertainty budget. The estimation of the phase values and the dependence of this values on the layout of the object, respectively the surrounding area will be discussed. Although the results obtained - due to the prototype status - are not yet completely satisfactory, the described analysis proves the potential of the newly developed interferometer for further reduction of uncertainty and possible use as a reference phase measurement instrumentation.

PROCEEDINGS ARTICLE | June 13, 2005

Enhancement of high-resolution electronic autocollimators by application of phase grating technology

Proc. SPIE. 5856, Optical Measurement Systems for Industrial Inspection IV

KEYWORDS: Diffraction, Point spread functions, Light sources, Reticles, Detection and tracking algorithms, Sensors, Ray tracing, Autocollimators, Distance measurement, Modulation transfer functions

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PROCEEDINGS ARTICLE | February 14, 2005

Diffractive lateral-shearing interferometer for phase-shift mask measurement using an excimer laser source

Proc. SPIE. 5776, Eighth International Symposium on Laser Metrology

KEYWORDS: Diffraction, Light sources, Interferometers, Wavefronts, Photomasks, Excimer lasers, Phase measurement, Phase shifts, Diffraction gratings, Shearing interferometers

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PROCEEDINGS ARTICLE | July 30, 2002

Lateral shearing interferometer for phase-shift mask measurement at 193 nm

Proc. SPIE. 4691, Optical Microlithography XV

KEYWORDS: Superposition, Diffraction, Light sources, Interferometers, Wavefronts, Photomasks, Phase measurement, Phase shifts, Diffraction gratings, Shearing interferometers

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PROCEEDINGS ARTICLE | July 30, 2002

Interference patterning of gratings with a period of 150 nm at a wavelength of 157 nm

Proc. SPIE. 4691, Optical Microlithography XV

KEYWORDS: Lithography, Diffraction, Telescopes, Mirrors, Polarizers, Photoresist materials, Spatial coherence, Excimer lasers, Semiconducting wafers, Diffraction gratings

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