Gerald E. Weineck
Chemical Engineer at Donaldson Co Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 13 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Semiconductors, Carbon, Lithography, Optical lithography, Contamination, Silicon, Gases, Chemistry

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Carbon, Optical lithography, Contamination, Deep ultraviolet, Silicon, Gases, Chemistry, Head-mounted displays, Natural surfaces, Industrial chemicals

Proceedings Article | 24 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Carbon, Lithography, FT-IR spectroscopy, Contamination, Calibration, Humidity, Adsorption, Absorbance, Head-mounted displays, Semiconducting wafers

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Carbon, Contamination, Fluctuations and noise, Silicon, Chemistry, Humidity, Adsorption, Semiconductor manufacturing, Head-mounted displays, Silicon carbide

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