Dr. Gerard M. Schmid
Senior Template Scientist at Canon Nanotechnologies Inc
SPIE Involvement:
Publications (24)

Proceedings Article | 25 May 2010 Paper
Kang Luo, Steven Ha, John Fretwell, Rick Ramos, Zhengmao Ye, Gerard Schmid, Dwayne LaBrake, Douglas Resnick, S. Sreenivasan
Proceedings Volume 7748, 77480A (2010) https://doi.org/10.1117/12.866882
KEYWORDS: Particles, Inspection, Lithography, Ozone, Defect inspection, Servomechanisms, Tantalum, Manufacturing, Coating, Contamination

Proceedings Article | 1 April 2010 Paper
Douglas Resnick, Gaddi Haase, Lovejeet Singh, David Curran, Gerard Schmid, Kang Luo, Cindy Brooks, Kosta Selinidis, John Fretwell, S. Sreenivasan
Proceedings Volume 7637, 76370R (2010) https://doi.org/10.1117/12.848391
KEYWORDS: Inspection, Photomasks, Lithography, Particles, Semiconducting wafers, Defect detection, Semiconductors, Optical inspection, Servomechanisms, Defect inspection

Proceedings Article | 23 September 2009 Paper
Gerard Schmid, Cynthia Brooks, Zhengmao Ye, Steve Johnson, Dwayne LaBrake, S. V. Sreenivasan, Douglas Resnick
Proceedings Volume 7488, 748820 (2009) https://doi.org/10.1117/12.833366
KEYWORDS: Servomechanisms, Lithography, Magnetism, Inspection, Electron beam lithography, Optical lithography, Beam propagation method, Data storage, Head, Photoresist processing

Proceedings Article | 18 March 2009 Paper
Cynthia Brooks, Gerard Schmid, Mike Miller, Steve Johnson, Niyaz Khusnatdinov, Dwayne LaBrake, Douglas Resnick, S. V. Sreenivasan
Proceedings Volume 7271, 72711L (2009) https://doi.org/10.1117/12.815016
KEYWORDS: Magnetism, Optical lithography, Lithography, Silica, Chromium, Etching, Beam propagation method, Servomechanisms, Manufacturing, Data storage

Proceedings Article | 19 May 2008 Paper
Proceedings Volume 7028, 70280R (2008) https://doi.org/10.1117/12.793034
KEYWORDS: Semiconducting wafers, Line width roughness, Lithography, Etching, Photomasks, Critical dimension metrology, Beam shaping, Overlay metrology, Manufacturing, Line edge roughness

Showing 5 of 24 publications
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