Gerardo Bottiglieri
Senior Design Engineer
SPIE Involvement:
Conference Program Committee | Author
Publications (22)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 1295302 (2024)
KEYWORDS: Photomasks, Light sources and illumination, Source mask optimization, Lithography, Near field, Diffraction

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12051, PC1205108 (2022)
KEYWORDS: Extreme ultraviolet, Refractive index, Nanoimprint lithography, High volume manufacturing, Extreme ultraviolet lithography, Diffraction, 3D printing, 3D image processing

Proceedings Article | 29 September 2021 Presentation
Proceedings Volume 11854, 118540U (2021)
KEYWORDS: Photomasks, Extreme ultraviolet, Diffraction, Refractive index, Systems modeling, Reflectivity, Phase shifts, Mirrors, Lithographic illumination, Extreme ultraviolet lithography

Proceedings Article | 28 September 2021 Presentation
Proceedings Volume 11854, 118540G (2021)
KEYWORDS: Imaging systems, Extreme ultraviolet, Fiber optic illuminators, Transistors, Scanners, Optimization (mathematics), Mirrors, Metals, Extreme ultraviolet lithography

SPIE Journal Paper | 20 May 2021 Open Access
JM3, Vol. 20, Issue 02, 021004, (May 2021)
KEYWORDS: Extreme ultraviolet, Photomasks, Waveguides, Refractive index, Waveguide modes, Diffraction, Wave propagation, Near field, Nanoimprint lithography, Extreme ultraviolet lithography

Showing 5 of 22 publications
Conference Committee Involvement (1)
Computational Optics 2024
10 April 2024 | Strasbourg, France
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