Gerry Hamdana
at Technische Univ Braunschweig
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 2 June 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Wheatstone bridges, Resonators, Device simulation, Nanoparticles, Actuators, Silicon, Sensors, Phase measurement, Signal processing, Design for manufacturability, Manufacturing, Micromachining

Proceedings Article | 30 May 2017
Proc. SPIE. 10248, Nanotechnology VIII
KEYWORDS: Nanoparticles, Plasma, Nanolithography, Silicon, Nanostructures, Nanofabrication, Particles, Cryogenics, Dry etching, Etching, Photomasks, Nanowires, Lithography, Surface properties, Modulation

SPIE Journal Paper | 27 May 2016
OE Vol. 55 Issue 09
KEYWORDS: Sensors, Silicon, Calibration, Sensor calibration, Piezoresistive sensors, Finite element methods, Etching, 3D modeling, Resistors, Optical engineering

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