Dr. Gerry Triani
at ANSTO
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | December 30, 2008
Proc. SPIE. 7267, Smart Materials V
KEYWORDS: Biosensing, Silica, Molecules, Ions, Silicon, Coating, Chemistry, Scanning electron microscopy, Atomic layer deposition, Self-assembled monolayers

PROCEEDINGS ARTICLE | September 10, 2008
Proc. SPIE. 7041, Nanostructured Thin Films
KEYWORDS: Antireflective coatings, Multilayers, Titanium dioxide, Optical properties, Crystals, Silicon, Optical coatings, Reflectivity, Transmission electron microscopy, Atomic layer deposition

PROCEEDINGS ARTICLE | August 20, 2005
Proc. SPIE. 5870, Advances in Thin-Film Coatings for Optical Applications II
KEYWORDS: Refractive index, Glasses, X-rays, Dielectrics, Interfaces, Silicon, Transmission electron microscopy, Silicon films, Atomic layer deposition, Aluminum

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Thin films, Multilayers, Titanium dioxide, Metals, Silicon, Silicon films, Photonics, Atomic layer deposition, Microelectronics

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Oxides, Thin films, Multilayers, Metals, Ions, Silicon, Atomic layer deposition, Aluminum, Chlorine

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