Dr. Gert Leusink
Director at TEL Technology Ctr America LLC
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 9, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Polishing, Optical lithography, Silica, Etching, Transmission electron microscopy, Plasma etching, Critical dimension metrology, Plasma, Chemical mechanical planarization

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