Dr. Geunsu Lee
at SK Hynix Inc
SPIE Involvement:
Author
Publications (24)

Proceedings Article | 30 March 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Carbon, Lithography, Etching, Particles, Silicon, Coating, Materials processing, Photomasks, Photoresist processing, System on a chip

Proceedings Article | 11 April 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Optical lithography, Polymers, Water, Glasses, Molecules, Digital watermarking, Molecular interactions, Photoresist processing, Polymer thin films, Liquids

Proceedings Article | 11 April 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Carbon, Lithography, Etching, Silicon, Chemistry, Reflectivity, Photoresist materials, Photomasks, Photoresist processing, System on a chip

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Polymers, Scanners, Particles, Coating, Manufacturing, Photoresist materials, Line edge roughness, Photoresist processing, Semiconducting wafers

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Semiconductors, Lithography, Monochromatic aberrations, Polymers, Molecules, Diffusion, Photoresist materials, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Proceedings Article | 4 May 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Nanotechnology, Polymers, Crystals, Interfaces, Hydrogen, Coating, Resistance, Photoresist materials, Thin film coatings, Semiconducting wafers

Showing 5 of 24 publications
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