Dr. Geunsu Lee
at SK Hynix Inc
SPIE Involvement:
Author
Publications (24)

Proceedings Article | 30 March 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Etching, System on a chip, Silicon, Coating, Lithography, Materials processing, Carbon, Particles, Photoresist processing, Photomasks

Proceedings Article | 11 April 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Polymers, Molecules, Digital watermarking, Photoresist processing, Liquids, Polymer thin films, Water, Optical lithography, Molecular interactions, Glasses

Proceedings Article | 11 April 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Etching, System on a chip, Photoresist materials, Photomasks, Silicon, Lithography, Reflectivity, Photoresist processing, Chemistry, Carbon

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Photoresist materials, Polymers, Coating, Semiconducting wafers, Particles, Scanners, Photoresist processing, Lithography, Line edge roughness, Manufacturing

Proceedings Article | 29 March 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Polymers, Diffusion, Critical dimension metrology, Molecules, Photoresist processing, Monochromatic aberrations, Semiconducting wafers, Semiconductors, Lithography, Photoresist materials

Showing 5 of 24 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top