Mr. Gevork S. Gevorkyan
Experimental Research Associate at Lawrence Berkeley National Lab
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Metrology, X-ray optics, Mirrors, Nano opto mechanical systems, Calibration, Synchrotron radiation, Light sources, Diffraction, Light, Interferometry

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: X-ray optics, Metrology, Interferometry, Prisms, Optical metrology, Free electron lasers, Diffraction, Synchrotrons, Coherent x-ray sources, X-ray sources

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: X-ray optics, Interferometry, Metrology, Optical metrology, Calibration, Optics manufacturing, Data analysis, Microscopes

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Imaging systems, Contrast transfer function, Software development, Scanning electron microscopy, Semiconductors, Silicon, Diffraction, Spatial frequencies, Transmission electron microscopy, Optical fabrication, Fabrication

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