Mr. Gevork S. Gevorkyan
Experimental Research Associate at Lawrence Berkeley National Lab
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Diffraction, Mirrors, Light sources, X-ray optics, Metrology, Nano opto mechanical systems, Calibration, Interferometry, Synchrotron radiation, Light

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Diffraction, Prisms, X-ray optics, Metrology, X-ray sources, Interferometry, Optical metrology, Synchrotrons, Free electron lasers, Coherent x-ray sources

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Microscopes, X-ray optics, Metrology, Calibration, Interferometry, Optical metrology, Optics manufacturing, Data analysis

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Fabrication, Semiconductors, Diffraction, Metrology, Imaging systems, Spatial frequencies, Silicon, Optical fabrication, Scanning electron microscopy, Transmission electron microscopy, Software development, Contrast transfer function

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