Dr. Gian Francesco Lorusso
Principal Scientist at imec
SPIE Involvement:
Publications (116)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 1295515 (2024) https://doi.org/10.1117/12.3010120
KEYWORDS: Scanning electron microscopy, Inspection, Metrology, Extreme ultraviolet lithography, Image processing, Semiconducting wafers, Modeling, Artificial intelligence, Overlay metrology, Image segmentation

Proceedings Article | 10 April 2024 Presentation + Paper
Matteo Beggiato, Dorin Cerbu, Roger Loo, Wei Sun, Alain Moussa, Gerhard Bast, Kaoru Fukaya, Christophe Beral, Anne-Laure Charley, Nachiketa Janardan, Andrew Cross, Gian Lorusso, Miki Isawa, Attilio Belmonte, Gouri Sankar Kar, Janusz Bogdanowicz
Proceedings Volume 12955, 129551F (2024) https://doi.org/10.1117/12.3011279
KEYWORDS: Semiconducting wafers, Optical inspection, Inspection, Crystals, Sampling rates, Laser phosphor displays, Superlattices, Optical testing, Defect detection, Signal processing

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129553S (2024) https://doi.org/10.1117/12.3015844
KEYWORDS: Semiconducting wafers, Inspection, Extreme ultraviolet, Metrology, Light sources and illumination, Stochastic processes, Etching, Defect inspection, Transmission electron microscopy

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12955, 1295516 (2024) https://doi.org/10.1117/12.3010898
KEYWORDS: Optical proximity correction, Metrology, Modeling, Extreme ultraviolet, Scanning electron microscopy, Shrinkage, Contour extraction, Signal to noise ratio, EUV optics

Proceedings Article | 22 November 2023 Presentation
Proceedings Volume PC12751, PC127510Q (2023) https://doi.org/10.1117/12.2687822
KEYWORDS: Optical proximity correction, Photomasks, Extreme ultraviolet, Calibration, Semiconducting wafers, Scanning electron microscopy, Printing, Modeling, Machine learning, Data modeling

Showing 5 of 116 publications
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