Dr. Gian F. Lorusso
Principal Scientist at imec
SPIE Involvement:
Author
Publications (74)

Proceedings Article | 23 March 2020
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Optical lithography, Etching, Annealing, Materials processing, Scanning electron microscopy, Line width roughness, Directed self assembly, Picosecond phenomena, Line edge roughness, Temperature metrology

Proceedings Article | 20 March 2020
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Electron beams, Metrology, Germanium, Silicon, Inspection, Scanning electron microscopy, Field effect transistors, Semiconducting wafers

SPIE Journal Paper | 4 April 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Inspection, Scanning electron microscopy, Capacitance, Resistance, Nanowires, Field effect transistors, Silicon, Transmission electron microscopy, Selenium, Semiconducting wafers

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Nanostructures, Data modeling, Scattering, X-rays, Manufacturing, Electron microscopes, Scanning electron microscopy, Data acquisition, Line width roughness, Line edge roughness

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Data modeling, Linear filtering, Scanning electron microscopy, Photomasks, Line width roughness, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers, Stochastic processes

Showing 5 of 74 publications
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