Dr. Gila E. Stein
Assistant Professor of Chemical & Biomolecular Eng at Univ of Houston
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Scattering, Annealing, Microscopy, Interfaces, Silicon, Scanning electron microscopy, Picosecond phenomena

SPIE Journal Paper | December 16, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Diffusion, Polymers, Data modeling, Photoresist materials, Chemically amplified resists, Infrared spectroscopy, Nanostructures, Lithography, Absorbance, Spectroscopy

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Data modeling, Polymers, Spectroscopy, Diffusion, Infrared spectroscopy, Infrared radiation, Absorbance, Stochastic processes, Chemically amplified resists

SPIE Journal Paper | August 12, 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Scattering, X-rays, Picosecond phenomena, Lithography, Polymethylmethacrylate, Metrology, 3D metrology, X-ray lithography, Absorption, Directed self assembly

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