Gilbert V. Shelden
Retired
SPIE Involvement:
Conference Chair | Symposium Chair | Author
Publications (18)

Proceedings Article | 2 May 2008
Proc. SPIE. 6792, 24th European Mask and Lithography Conference
KEYWORDS: Manufacturing, Pellicles, Printing, Data processing, Microelectronics, Photomasks, Optical proximity correction, Data conversion, Binary data, Phase shifts

Proceedings Article | 23 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Logic, Glasses, Manufacturing, Inspection, Pellicles, Data processing, Photomasks, Optical proximity correction, Photomask technology, Binary data

Proceedings Article | 3 May 2007
Proc. SPIE. 6533, 23rd European Mask and Lithography Conference
KEYWORDS: Logic, Pellicles, Printing, Data processing, Microelectronics, Photomasks, Optical proximity correction, Data conversion, Binary data, Phase shifts

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Semiconductors, Databases, Glasses, Manufacturing, Pellicles, Data processing, Microelectronics, Photomasks, Yield improvement, Binary data

Proceedings Article | 21 June 2006
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Semiconductors, Manufacturing, Pellicles, Printing, Data processing, Microelectronics, Photomasks, Optical proximity correction, Data conversion, Binary data

Showing 5 of 18 publications
Conference Committee Involvement (6)
16th Annual BACUS Symposium on Photomask Technology and Management
18 September 1996 | Redwood City, CA, United States
16th Annual BACUS Symposium on Photomask Technology and Management
18 September 1996 | Redwood City, United States
15th Annual BACUS Symposium on Photomask Technology and Management
20 September 1995 | Santa Clara, CA, United States
15th Annual BACUS Symposium on Photomask Technology and Management '95
20 September 1995 | Santa Clara, United States
14th Annual BACUS Symposium on Photomask Technology and Management
14 September 1994 | Santa Clara, CA, United States
Showing 5 of 6 published special sections
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