Dr. Gioia Della Giustina
at Univ degli Studi di Padova
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 3 January 2019
Proc. SPIE. 11042, XXII International Symposium on High Power Laser Systems and Applications
KEYWORDS: Extreme ultraviolet, Plasma, Graphene, Photomasks, Optical lithography, Extreme ultraviolet lithography, Spatial resolution, Silicon, Photoresist materials, Lithography

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Chemical analysis, Extreme ultraviolet lithography, X-rays, Photoresist materials, Absorption, X-ray lithography, Electron beam lithography, Materials science, Photoresist processing, Photoresist technology, Lithography, Extreme ultraviolet, Silicon, Photons

Proceedings Article | 10 September 2014
Proc. SPIE. 9161, Nanophotonic Materials XI
KEYWORDS: Lithography, Sol-gels, Photomasks, Resistance, Silicon, Scanning electron microscopy, Active optics, Nanostructures, Molecules, Optical lithography

Proceedings Article | 3 May 2013
Proc. SPIE. 8778, Advances in X-ray Free-Electron Lasers II: Instrumentation
KEYWORDS: Diffraction gratings, Monochromators, Ultrafast phenomena, Extreme ultraviolet, Mirrors, Diffraction, Spherical lenses, Optical design, Vignetting, Interferometers

Proceedings Article | 18 February 2010
Proc. SPIE. 7582, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications IX
KEYWORDS: Quantum dots, Sol-gels, Zirconium dioxide, Absorption, Semiconductors, Luminescence, Laser systems engineering, Prototyping, Bioalcohols, Quartz

Showing 5 of 6 publications
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