Prof. Giovanna Brusatin
at Univ degli Studi di Padova
SPIE Involvement:
Publications (14)

Proceedings Article | 3 January 2019 Paper
Proc. SPIE. 11042, XXII International Symposium on High Power Laser Systems and Applications
KEYWORDS: Lithography, Optical lithography, Graphene, Silicon, Photoresist materials, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Spatial resolution, Plasma

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Electron beam lithography, Photons, X-rays, Silicon, Materials science, Photoresist materials, Extreme ultraviolet, Chemical analysis, Extreme ultraviolet lithography, Photoresist processing, X-ray lithography, Photoresist technology, Absorption

Proceedings Article | 28 August 2015 Presentation + Paper
Proc. SPIE. 9547, Plasmonics: Metallic Nanostructures and Their Optical Properties XIII
KEYWORDS: Plasmonics, Refractive index, Surface plasmons, Titanium dioxide, Sensors, Electrons, Gases, Hydrogen, Reflectivity, Terahertz radiation

Proceedings Article | 10 September 2014 Paper
Proc. SPIE. 9161, Nanophotonic Materials XI
KEYWORDS: Lithography, Nanostructures, Optical lithography, Molecules, Silicon, Resistance, Scanning electron microscopy, Photomasks, Sol-gels, Active optics

Proceedings Article | 3 May 2013 Paper
Proc. SPIE. 8778, Advances in X-ray Free-Electron Lasers II: Instrumentation
KEYWORDS: Ultrafast phenomena, Diffraction, Mirrors, Optical design, Interferometers, Vignetting, Extreme ultraviolet, Monochromators, Spherical lenses, Diffraction gratings

Showing 5 of 14 publications
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