Dr. Glenn H. Chapman Profile

Dr. Glenn H. Chapman

Chair & Professor Engineering Science at Simon Fraser Univ

SPIE Involvement:

Conference Program Committee | Author | Student Chapter CoAdvisor

Publications (88)

PROCEEDINGS ARTICLE | March 14, 2018

Fabricating and characterizing long lived tissue phantoms using intralipid-infused solids

Proc. SPIE. 10492, Optical Interactions with Tissue and Cells XXIX

KEYWORDS: Biomedical optics, Tissues, Scattering, Light scattering, Laser scattering, Image analysis, Optical fabrication, Solids, Tissue optics, Scatter measurement

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PROCEEDINGS ARTICLE | February 22, 2018

Detection of low-concentration ammonia using differential laser-induced fluorescence on vapochromic coordination polymers

Proc. SPIE. 10539, Photonic Instrumentation Engineering V

KEYWORDS: Sensors, Calibration, Polymers, Spectroscopy, Luminescence, Gases, Nitrogen, Laser induced fluorescence, Semiconductor lasers, Spectral data processing

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PROCEEDINGS ARTICLE | March 18, 2016

Enhancing defect tolerance in periodic post microfluidic channels

Proc. SPIE. 9705, Microfluidics, BioMEMS, and Medical Microsystems XIV

KEYWORDS: Modeling, Microfluidics, Biomedical optics, Sensors, Particles, Silicon, Computer simulations, 3D modeling, Monte Carlo methods, Mathematics, Photomasks, Tolerancing, Statistical modeling, Fluid dynamics, Protactinium

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PROCEEDINGS ARTICLE | March 24, 2015

Modeling defect tolerance sensitivity to periodic post parameters in microfluidic channels

Proc. SPIE. 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII

KEYWORDS: MATLAB, Microfluidics, Particles, Computer simulations, 3D modeling, Monte Carlo methods, Tolerancing, Fluid dynamics, Systems modeling, Protactinium

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PROCEEDINGS ARTICLE | March 13, 2015

Enhanced correction methods for high density hot pixel defects in digital imagers

Proc. SPIE. 9403, Image Sensors and Imaging Systems 2015

KEYWORDS: Curium, Imaging systems, Cameras, Sensors, Calibration, Ions, Neodymium, Algorithm development, CCD image sensors, Standards development

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PROCEEDINGS ARTICLE | March 7, 2014

Calibrating bimetallic grayscale photomasks to photoresist response for precise micro-optics fabrication

Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX

KEYWORDS: Transparency, Optical lithography, Sensors, Calibration, Glasses, Photoresist materials, Micro optics, Photomasks, Absorbance, Photoresist processing

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PROCEEDINGS ARTICLE | March 6, 2014

Modeling particle flow and blockages in microfluidic channels supported by periodic posts

Proc. SPIE. 8976, Microfluidics, BioMEMS, and Medical Microsystems XII

KEYWORDS: MATLAB, Microfluidics, Statistical analysis, Sensors, Particles, 3D modeling, Monte Carlo methods, Tolerancing, Statistical modeling, Systems modeling

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PROCEEDINGS ARTICLE | March 4, 2014

Correcting high-density hot pixel defects in digital imagers

Proc. SPIE. 9022, Image Sensors and Imaging Systems 2014

KEYWORDS: Curium, Data modeling, Imaging systems, Cameras, Sensors, Calibration, Photography, Image quality, CCD image sensors, Standards development

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PROCEEDINGS ARTICLE | February 19, 2013

Empirical formula for rates of hot pixel defects based on pixel size, sensor area, and ISO

Proc. SPIE. 8659, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIV

KEYWORDS: Cell phones, Imaging systems, Cameras, Sensors, Calibration, CCD cameras, Image sensors, Charge-coupled devices, CCD image sensors, Standards development

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PROCEEDINGS ARTICLE | November 8, 2012

Bimetallic grayscale photomasks for micro-optics fabrication using dual wavelength laser writing techniques

Proc. SPIE. 8522, Photomask Technology 2012

KEYWORDS: Optical filters, Modulation, Sensors, Argon ion lasers, Photoresist materials, Micro optics, Photomasks, Beam shaping, Binary data, Camera shutters

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PROCEEDINGS ARTICLE | March 7, 2012

Fluorescence angular domain imaging of skin tissue phantoms using intralipid-infused solids

Proc. SPIE. 8221, Optical Interactions with Tissue and Cells XXIII

KEYWORDS: Tissues, Scattering, Skin, Luminescence, Photons, Light scattering, Collagen, Solids, Image filtering, Tissue optics

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PROCEEDINGS ARTICLE | March 7, 2012

Incoherent source angular domain imaging through complex three-dimensional scattering structures

Proc. SPIE. 8221, Optical Interactions with Tissue and Cells XXIII

KEYWORDS: Optical filters, Light emitting diodes, 3D acquisition, Scattering, Photons, Light scattering, Laser scattering, Image quality, Image filtering, 3D image processing

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PROCEEDINGS ARTICLE | February 18, 2012

Bimetallic grayscale photomasks written using flat-top beam vs. Gaussian beam

Proc. SPIE. 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII

KEYWORDS: Thin films, Prisms, Transparency, Gaussian beams, Sensors, Glasses, Digital imaging, Photomasks, Beam shaping, Binary data

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PROCEEDINGS ARTICLE | February 15, 2012

Projecting the rate of in-field pixel defects based on pixel size, sensor area, and ISO

Proc. SPIE. 8298, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIII

KEYWORDS: Imaging systems, Cameras, Sensors, Calibration, Control systems, CCD cameras, Image sensors, Charge-coupled devices, Picosecond phenomena, CCD image sensors

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PROCEEDINGS ARTICLE | October 14, 2011

Improving the accuracy of the bimetallic grayscale photomasks using a feedback controlled flat-top beam

Proc. SPIE. 8166, Photomask Technology 2011

KEYWORDS: Transparency, Optical lithography, Sensors, Photoresist materials, Objectives, Transmittance, Photomasks, Beam shaping, Raster graphics, Binary data

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PROCEEDINGS ARTICLE | March 2, 2011

Angular-domain imaging of fluorescence sources within tissue phantoms

Proc. SPIE. 7897, Optical Interactions with Tissue and Cells XXII

KEYWORDS: Tissues, Imaging systems, Scattering, Luminescence, Photons, Light scattering, Chromium, Monte Carlo methods, Collimators, Image filtering

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PROCEEDINGS ARTICLE | March 2, 2011

Optical imaging through non-transparent small aquatic creatures with angular-domain imaging

Proc. SPIE. 7897, Optical Interactions with Tissue and Cells XXII

KEYWORDS: Optical filters, Light sources, Imaging systems, Scattering, Photons, Light scattering, Nd:YAG lasers, Laser scattering, Semiconductor lasers, Image sensors

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PROCEEDINGS ARTICLE | February 17, 2011

Tradeoffs in imager design parameters for sensor reliability

Proc. SPIE. 7875, Sensors, Cameras, and Systems for Industrial, Scientific, and Consumer Applications XII

KEYWORDS: Imaging systems, Cameras, Sensors, Calibration, Photography, Reliability, CCD cameras, Image sensors, Picosecond phenomena, CCD image sensors

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PROCEEDINGS ARTICLE | February 17, 2011

Simulating enhanced photo carrier collection in the multifinger photogate active pixel sensors

Proc. SPIE. 7875, Sensors, Cameras, and Systems for Industrial, Scientific, and Consumer Applications XII

KEYWORDS: CMOS sensors, Sensors, Photodiodes, Computer simulations, CMOS technology, Active sensors, TCAD, Device simulation, Standards development, Absorption

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PROCEEDINGS ARTICLE | February 14, 2011

Bimetallic grayscale photomasks written using optical density feedback control

Proc. SPIE. 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV

KEYWORDS: Thin films, Transparency, Optical lithography, Sensors, Argon ion lasers, Objectives, Photomasks, Absorbance, Raster graphics, Feedback control

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SPIE Journal Paper | November 1, 2010

Angular domain transillumination imaging optimization with an ultrafast gated camera

Vasefi, Fartash , Najiminaini, Mohamadreza , Ng, Eldon , Kaminska, Bozena , Chapman, Glenn , Carson, Jeffrey

JBO Vol. 15 Issue 06

KEYWORDS: Photons, Scattering, Light scattering, Cameras, Imaging systems, Chromium, Tissue optics, Sensors, Pulsed laser operation, Reflection

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PROCEEDINGS ARTICLE | March 22, 2010

Angle-resolved spectroscopy using a radial angular filter array

Proc. SPIE. 7562, Optical Interactions with Tissues and Cells XXI

KEYWORDS: Optical filters, Light sources, Imaging systems, Scattering, Spectroscopy, Silicon, Light scattering, Collimation, Diffusers, Tissue optics

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PROCEEDINGS ARTICLE | March 18, 2010

Angular domain spectroscopic imaging of turbid media using silicon micromachined microchannel arrays

Proc. SPIE. 7568, Imaging, Manipulation, and Analysis of Biomolecules, Cells, and Tissues VIII

KEYWORDS: Hyperspectral imaging, Optical filters, Tissues, Imaging systems, Spectroscopy, Photons, Light scattering, Imaging spectroscopy, Image filtering, Tissue optics

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PROCEEDINGS ARTICLE | February 24, 2010

Contrast and resolution analysis of angular domain imaging for iterative optical projection tomography reconstruction

Proc. SPIE. 7557, Multimodal Biomedical Imaging V

KEYWORDS: Optical imaging, Optical filters, Detection and tracking algorithms, Imaging systems, Signal attenuation, Photons, Image resolution, Tomography, Image filtering, Reconstruction algorithms

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PROCEEDINGS ARTICLE | February 23, 2010

Spatiofrequency filters for imaging fluorescence in scattering media

Proc. SPIE. 7562, Optical Interactions with Tissues and Cells XXI

KEYWORDS: Optical filters, Tissues, Scattering, Cameras, Luminescence, Photons, Light scattering, Image resolution, Monte Carlo methods, Image filtering

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PROCEEDINGS ARTICLE | February 23, 2010

Optical imaging of structures within highly scattering material using an incoherent beam and a spatial filter

Proc. SPIE. 7562, Optical Interactions with Tissues and Cells XXI

KEYWORDS: Point spread functions, Optical filters, Scattering, Spatial filters, Photons, Laser scattering, Monte Carlo methods, Collimation, Image filtering, Tissue optics

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PROCEEDINGS ARTICLE | February 18, 2010

Defect tolerance in microfluidic chambers for capacitive biosensors

Proc. SPIE. 7593, Microfluidics, BioMEMS, and Medical Microsystems VIII

KEYWORDS: Electronics, Microfluidics, Biomedical optics, Sensors, Electrodes, Particles, Biosensors, Capacitance, Tolerancing, Protactinium

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PROCEEDINGS ARTICLE | January 26, 2010

Analyzing the impact of ISO on digital imager defects with an automatic defect trace algorithm

Proc. SPIE. 7536, Sensors, Cameras, and Systems for Industrial/Scientific Applications XI

KEYWORDS: Defect detection, Imaging systems, Cameras, Sensors, Calibration, Photography, CCD cameras, Image sensors, Algorithm development, CCD image sensors

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PROCEEDINGS ARTICLE | January 26, 2010

Enhanced sensitivity achievement using advanced device simulation of multifinger photo gate active pixel sensors

Proc. SPIE. 7536, Sensors, Cameras, and Systems for Industrial/Scientific Applications XI

KEYWORDS: CMOS sensors, Sensors, Silicon, Computer simulations, Transistors, Molybdenum, Active sensors, Device simulation, Standards development, Absorption

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SPIE Journal Paper | January 1, 2010

Angular domain fluorescence imaging for small animal research

Vasefi, Fartash , Belton, Michelle , Kaminska, Bozena , Chapman, Glenn , Carson, Jeffrey

JBO Vol. 15 Issue 01

KEYWORDS: Imaging systems, Luminescence, Preclinical imaging, Tissues, Photons, Medical research, Spatial resolution, X-ray computed tomography, Image filtering, Cameras

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PROCEEDINGS ARTICLE | September 23, 2009

Enhanced laser-writing techniques for bimetallic grayscale photomasks

Proc. SPIE. 7488, Photomask Technology 2009

KEYWORDS: Thin films, Optical filters, Optical lithography, Sensors, Calibration, Sputter deposition, Glasses, Indium, Argon ion lasers, Photomasks

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PROCEEDINGS ARTICLE | July 10, 2009

Angular domain optical imaging of turbid media using enhanced micro-tunnel filter arrays

Proc. SPIE. 7369, Diffuse Optical Imaging II

KEYWORDS: Optical imaging, Optical filters, Reflection, Imaging systems, Scattering, Sensors, Photons, Silicon, Light scattering, Image filtering

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PROCEEDINGS ARTICLE | February 25, 2009

Angular domain fluorescent lifetime imaging in turbid media

Proc. SPIE. 7183, Multiphoton Microscopy in the Biomedical Sciences IX

KEYWORDS: Laser sources, Optical filters, Tissues, Scattering, Cameras, Luminescence, Photons, Light scattering, Picosecond phenomena, Pulsed laser operation

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PROCEEDINGS ARTICLE | February 25, 2009

Spatiofrequency filter in turbid medium enhanced by background scattered light subtraction from a deviated laser source

Proc. SPIE. 7175, Optical Interactions with Tissue and Cells XX

KEYWORDS: Optical filters, Prisms, Scattering, Photons, Light scattering, Laser scattering, Linear filtering, Image filtering, Image enhancement, Light

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PROCEEDINGS ARTICLE | February 25, 2009

Angular distribution of quasi-ballistic light measured through turbid media using angular domain optical imaging

Proc. SPIE. 7175, Optical Interactions with Tissue and Cells XX

KEYWORDS: Optical filters, Scattering, Photons, Silicon, Light scattering, Semiconductor lasers, Image filtering, Spatial resolution, Tissue optics, Light

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PROCEEDINGS ARTICLE | February 24, 2009

Optical characterization of the mask writing process in bimetallic grayscale photomasks

Proc. SPIE. 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII

KEYWORDS: Thin films, Optical filters, Optical lithography, Sensors, Calibration, Sputter deposition, Indium, Photomasks, Bismuth, Tin

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PROCEEDINGS ARTICLE | February 24, 2009

Effect of time gating and polarization discrimination of propagating light in turbid media during angular domain imaging (ADI)

Proc. SPIE. 7182, Imaging, Manipulation, and Analysis of Biomolecules, Cells, and Tissues VII

KEYWORDS: Optical filters, Polarization, Tissues, Scattering, Cameras, Photons, Light scattering, Laser scattering, Picosecond phenomena, Pulsed laser operation

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PROCEEDINGS ARTICLE | February 24, 2009

Image contrast enhancement during time-angular domain imaging through turbid media by estimation of background scattered light

Proc. SPIE. 7182, Imaging, Manipulation, and Analysis of Biomolecules, Cells, and Tissues VII

KEYWORDS: Optical filters, Scattering, Cameras, Microchannel plates, Photons, Light scattering, Collimation, Image enhancement, Picosecond phenomena, Image contrast enhancement

Read Abstract

PROCEEDINGS ARTICLE | February 24, 2009

Angular domain optical projection tomography in turbid media

Proc. SPIE. 7174, Optical Tomography and Spectroscopy of Tissue VIII

KEYWORDS: Optical filters, Imaging systems, Scattering, Photons, Light scattering, Laser scattering, Semiconductor lasers, Tomography, Projection systems, Optical tomography

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PROCEEDINGS ARTICLE | January 28, 2009

The implementation and spectrum response analysis of multifinger photogate APS pixels

Proc. SPIE. 7249, Sensors, Cameras, and Systems for Industrial/Scientific Applications X

KEYWORDS: CMOS sensors, Light emitting diodes, Capacitors, Sensors, Calibration, Silicon, Quantum efficiency, Transistors, Molybdenum, Absorption

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PROCEEDINGS ARTICLE | January 19, 2009

Statistical identification and analysis of defect development in digital imagers

Proc. SPIE. 7250, Digital Photography V

KEYWORDS: Statistical analysis, Defect detection, Detection and tracking algorithms, Imaging systems, Cameras, Sensors, Error analysis, Optical inspection, Image sensors, CCD image sensors

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PROCEEDINGS ARTICLE | October 17, 2008

Effects of heated substrates on bimetallic thermal resist for lithography and grayscale photomask applications

Proc. SPIE. 7122, Photomask Technology 2008

KEYWORDS: Thin films, Transparency, Sensors, Calibration, Argon ion lasers, Laser development, Nd:YAG lasers, Objectives, Photomasks, Laser systems engineering

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PROCEEDINGS ARTICLE | March 19, 2008

Characterization of pixel defect development during digital imager lifetime

Proc. SPIE. 6816, Sensors, Cameras, and Systems for Industrial/Scientific Applications IX

KEYWORDS: Statistical analysis, Detection and tracking algorithms, Imaging systems, Cameras, Sensors, Calibration, Image processing, Error analysis, Computer simulations, Algorithm development

Read Abstract

PROCEEDINGS ARTICLE | March 5, 2008

Enhanced angular domain optical imaging by background scattered light subtraction from a deviated laser source

Proc. SPIE. 6854, Optical Interactions with Tissue and Cells XIX

KEYWORDS: Optical filters, Digital signal processing, Scattering, Image processing, Photons, Light scattering, Laser scattering, Image filtering, Image enhancement, Light

Read Abstract

PROCEEDINGS ARTICLE | February 20, 2008

Optical imaging of structures within highly scattering material using a lens and aperture to form a spatiofrequency filter

Proc. SPIE. 6854, Optical Interactions with Tissue and Cells XIX

KEYWORDS: Optical filters, Scattering, Photons, Light scattering, Laser scattering, Image resolution, Linear filtering, Image sensors, Image filtering, Tissue optics

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PROCEEDINGS ARTICLE | February 6, 2008

Enhancing direct-write laser control techniques for bimetallic grayscale photomasks

Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics

KEYWORDS: Transparency, Optical lithography, Cameras, Sensors, Calibration, Argon ion lasers, Profilometers, Photomasks, Electro optics, Camera shutters

Read Abstract

PROCEEDINGS ARTICLE | November 1, 2007

Bimetallic thermal resists potential for double-exposure immersion lithography and grayscale photomasks

Proc. SPIE. 6730, Photomask Technology 2007

KEYWORDS: Thin films, Lithography, Transparency, Optical lithography, Sensors, Calibration, Argon ion lasers, Photodiodes, Photomasks, Immersion lithography

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PROCEEDINGS ARTICLE | March 13, 2007

Improving the optical characteristics of bimetallic grayscale photomasks

Proc. SPIE. 6458, Photon Processing in Microelectronics and Photonics VI

KEYWORDS: Thin films, Optical filters, Cameras, Glasses, Video, Argon ion lasers, CCD cameras, Photomasks, Raster graphics, Binary data

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PROCEEDINGS ARTICLE | February 20, 2007

Identification of in-field defect development in digital image sensors

Proc. SPIE. 6502, Digital Photography III

KEYWORDS: CMOS sensors, Imaging systems, Cameras, Sensors, Calibration, Photography, Manufacturing, Digital cameras, Image sensors, CCD image sensors

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PROCEEDINGS ARTICLE | February 6, 2007

Multispectral angular domain optical tomography in scattering media with argon and diode laser sources

Proc. SPIE. 6435, Optical Interactions with Tissue and Cells XVIII

KEYWORDS: Optical filters, Tissues, Scattering, Silicon, Light scattering, Argon ion lasers, Laser scattering, Semiconductor lasers, Collimation, Image filtering

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PROCEEDINGS ARTICLE | January 22, 2007

Creation of embedded structures in SU-8

Proc. SPIE. 6465, Microfluidics, BioMEMS, and Medical Microsystems V

KEYWORDS: Microscopes, Quartz, Glasses, Ultraviolet radiation, Scanning electron microscopy, Photoresist materials, Bridges, Photomasks, Semiconducting wafers, Binary data

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PROCEEDINGS ARTICLE | October 24, 2006

Deep illumination angular domain imaging within highly scattering media enhanced by image processing

Proc. SPIE. 6380, Smart Medical and Biomedical Sensor Technology IV

KEYWORDS: Optical filters, Scattering, Image processing, Photons, Silicon, Light scattering, Laser scattering, Image filtering, Image enhancement, Tissue optics

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PROCEEDINGS ARTICLE | October 20, 2006

Adding grayscale layer to chrome photomasks

Proc. SPIE. 6349, Photomask Technology 2006

KEYWORDS: Thin films, Reticles, Optical lithography, Calibration, Glasses, Argon ion lasers, Photoresist materials, Photomasks, Binary data, Oxidation

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PROCEEDINGS ARTICLE | March 29, 2006

Laser-induced oxidation of metallic thin films as a method for creating grayscale photomasks

Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII

KEYWORDS: Thin films, Lithography, Beam splitters, Metals, Argon ion lasers, Photoresist materials, Photomasks, Raster graphics, Radium, Oxidation

Read Abstract

PROCEEDINGS ARTICLE | March 1, 2006

Enhanced angular domain imaging in turbid media using Gaussian line illumination

Proc. SPIE. 6084, Optical Interactions with Tissue and Cells XVII

KEYWORDS: Carbon, Scattering, Sensors, Photons, Silicon, Light scattering, Laser scattering, Collimators, Beam expanders, Tissue optics

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PROCEEDINGS ARTICLE | March 1, 2006

Real-time optical characterization of laser oxidation process in bimetallic direct write gray scale photomasks

Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V

KEYWORDS: Thin films, Photovoltaics, Optical filters, Argon ion lasers, Photodiodes, Diodes, Photomasks, Absorbance, Camera shutters, Oxidation

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PROCEEDINGS ARTICLE | March 1, 2006

Laser-induced oxidation of Zn and Zn alloy films for direct-write grayscale photomasks

Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V

KEYWORDS: Oxides, Modulation, Glasses, Argon ion lasers, Zinc, Objectives, Photomasks, Raster graphics, Zinc oxide, Oxidation

Read Abstract

PROCEEDINGS ARTICLE | February 6, 2006

Noise analysis of fault tolerant active pixel sensors with and without defects

Proc. SPIE. 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII

KEYWORDS: Signal to noise ratio, Imaging systems, Sensors, Interference (communication), Amplifiers, Photodiodes, Transistors, Resistors, Active sensors, Standards development

Read Abstract

PROCEEDINGS ARTICLE | January 17, 2006

Robust detection of defects in imaging arrays

Proc. SPIE. 6059, Image Quality and System Performance III

KEYWORDS: Defect detection, Imaging systems, Sensors, Calibration, Image processing, Error analysis, Manufacturing, Computer simulations, Monte Carlo methods, Imaging arrays

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PROCEEDINGS ARTICLE | November 4, 2005

Expanding grayscale capability of direct-write grayscale photomask by using modified Bi/In compositions

Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology

KEYWORDS: Oxides, Transparency, Gaussian beams, Glasses, Argon ion lasers, Photomasks, Absorbance, Bismuth, Absorption, Oxidation

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PROCEEDINGS ARTICLE | May 27, 2005

Inter-layer vias and TESH interconnection network for a 3-D heterogeneous sensor system on a chip

Proc. SPIE. 5796, Unattended Ground Sensor Technologies and Applications VII

KEYWORDS: Infrared sensors, Sensors, Etching, Metals, Silicon, Resistance, Signal processing, Acoustics, Semiconducting wafers, System on a chip

Read Abstract

PROCEEDINGS ARTICLE | May 4, 2005

Enhanced inorganic bimetallic thermal resists transparency and resolution for photomask fabrication

Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII

KEYWORDS: Lithography, Transparency, Glasses, Silicon, Photoresist materials, Silicon films, Photomasks, Aluminum, Absorbance, Oxidation

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PROCEEDINGS ARTICLE | April 15, 2005

Angular domain image detectability with changing turbid medium scattering coefficients

Proc. SPIE. 5695, Optical Interactions with Tissue and Cells XVI

KEYWORDS: Imaging systems, Scattering, Sensors, Photons, Light scattering, Laser scattering, Image resolution, Collimators, Charge-coupled devices, Beam expanders

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PROCEEDINGS ARTICLE | April 15, 2005

Monte Carlo simulations of the growth and decay of quasi-ballistic photon fractions with depth in an isotropic scattering medium

Proc. SPIE. 5695, Optical Interactions with Tissue and Cells XVI

KEYWORDS: Tissues, Scattering, Sensors, Single photon, Light scattering, Monte Carlo methods, Tissue optics, Photon transport, Absorption, Anisotropy

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PROCEEDINGS ARTICLE | April 12, 2005

Creating precise 3D microstructures using laser direct-write bimetallic thermal resist grayscale photomasks

Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV

KEYWORDS: Lithography, Calibration, Glasses, Silicon, Photoresist materials, Silicon films, Photomasks, Raster graphics, Camera shutters, Photoresist developing

Read Abstract

PROCEEDINGS ARTICLE | March 7, 2005

Fault tolerant photodiode and photogate active pixel sensors

Proc. SPIE. 5677, Sensors and Camera Systems for Scientific and Industrial Applications VI

KEYWORDS: Microscopes, Imaging systems, Sensors, Reliability, Photodiodes, Optical testing, Optical simulations, Transistors, Active sensors, Device simulation

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PROCEEDINGS ARTICLE | December 9, 2004

Laser direct write patterned indium tin oxide films for photomasks and anisotropic resist applications

Proc. SPIE. 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education

KEYWORDS: Oxides, Etching, Indium, Silicon, Laser processing, Photomasks, Semiconducting wafers, Anisotropic etching, Tin, Oxidation

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PROCEEDINGS ARTICLE | December 6, 2004

Calibrating grayscale direct write bimetallic photomasks to create 3D photoresist structures

Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology

KEYWORDS: Transparency, Calibration, Silicon, Photoresist materials, Photomasks, Absorbance, Raster graphics, Binary data, Camera shutters, Tin

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PROCEEDINGS ARTICLE | September 1, 2004

3D heterogeneous sensor system on a chip for defense and security applications

Proc. SPIE. 5417, Unattended/Unmanned Ground, Ocean, and Air Sensor Technologies and Applications VI

KEYWORDS: Infrared sensors, Infrared imaging, Digital signal processing, Sensors, Silicon, 3D modeling, Analog electronics, Acoustics, System on a chip, 3D image processing

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PROCEEDINGS ARTICLE | July 15, 2004

Creating 3D structures with a direct-write grayscale photomask made from Sn/In bimetallic films

Proc. SPIE. 5339, Photon Processing in Microelectronics and Photonics III

KEYWORDS: Glasses, Indium, Argon ion lasers, Photoresist materials, Photomasks, Absorbance, Raster graphics, Binary data, Tin, Absorption

Read Abstract

PROCEEDINGS ARTICLE | July 1, 2004

Angular domain imaging of phantom objects within highly scattering mediums

Proc. SPIE. 5319, Laser Interaction with Tissue and Cells XV

KEYWORDS: Optical spheres, Scattering, Sensors, Photons, Light scattering, Laser scattering, Monte Carlo methods, Collimators, Charge-coupled devices, Tissue optics

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PROCEEDINGS ARTICLE | June 14, 2004

Fault-tolerant active pixel sensors for large-area digital imaging systems

Proc. SPIE. 5356, Optoelectronic Integrated Circuits VI

KEYWORDS: CMOS sensors, Imaging systems, Sensors, Error analysis, Photodiodes, Transistors, CMOS technology, Signal detection, Tolerancing, Active sensors

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PROCEEDINGS ARTICLE | May 14, 2004

Inorganic Bi/In thermal resist as a high-etch-ratio patterning layer for CF4/CHF3/O2 plasma etch

Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI

KEYWORDS: Optical lithography, Etching, Indium, Silicon, Photoresist materials, Wet etching, Bismuth, Plasma etching, Anisotropic etching, Plasma

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PROCEEDINGS ARTICLE | December 30, 2003

Bi/In thermal resist for both Si anisotropic wet etching and Si/SiO2 plasma etching

Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX

KEYWORDS: Etching, Indium, Silicon, Photoresist materials, Wet etching, Bismuth, Plasma etching, Semiconducting wafers, Anisotropic etching, Plasma

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PROCEEDINGS ARTICLE | December 17, 2003

Creating direct-write gray-scale photomasks with bimetallic thin film thermal resists

Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology

KEYWORDS: Glasses, Argon ion lasers, Semiconductor lasers, Photoresist materials, Photomasks, Absorbance, Bismuth, Raster graphics, Binary data, Absorption

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PROCEEDINGS ARTICLE | October 17, 2003

Single step direct-write photomask made from bimetallic Bi/In thermal resist

Proc. SPIE. 4977, Photon Processing in Microelectronics and Photonics II

KEYWORDS: Oxides, Quartz, Glasses, Solar cells, Silicon, Argon ion lasers, Photomasks, Absorbance, Bismuth, Absorption

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PROCEEDINGS ARTICLE | July 29, 2003

Angular domain optical imaging of structures within highly scattering material using silicon micromachined collimating arrays

Proc. SPIE. 4955, Optical Tomography and Spectroscopy of Tissue V

KEYWORDS: Scattering, Sensors, Glasses, Photons, Silicon, Light scattering, Laser scattering, Monte Carlo methods, Collimators, Charge-coupled devices

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PROCEEDINGS ARTICLE | June 12, 2003

Wavelength invariant Bi/In thermal resist as a Si anisotropic etch masking layer and direct-write photomask material

Proc. SPIE. 5039, Advances in Resist Technology and Processing XX

KEYWORDS: Etching, Quartz, Glasses, Silicon, Argon ion lasers, Photomasks, Bismuth, Thermal modeling, Anisotropic etching, Absorption

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PROCEEDINGS ARTICLE | January 15, 2003

Bi/In as patterning and masking layers for alkaline-based Si anisotropic etching

Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII

KEYWORDS: Optical lithography, Etching, Copper, Silicon, Argon ion lasers, Photoresist materials, Photomasks, Bismuth, Semiconducting wafers, Anisotropic etching

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PROCEEDINGS ARTICLE | July 24, 2002

Bi/In bimetallic thermal resists for microfabrication, photomasks, and micromachining applications

Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX

KEYWORDS: Etching, Copper, Silicon, Argon ion lasers, Photoresist materials, Photomasks, Bismuth, Plating, Photoresist processing, Absorption

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PROCEEDINGS ARTICLE | June 18, 2002

Bimetallic thermal activated films for microfabrication, photomasks, and data storage

Proc. SPIE. 4637, Photon Processing in Microelectronics and Photonics

KEYWORDS: Etching, Copper, Nickel, Nd:YAG lasers, Photomasks, Bismuth, Plating, Photoresist processing, Semiconducting wafers, Absorption

Read Abstract

PROCEEDINGS ARTICLE | March 26, 2002

Optical imaging of objects within highly scattering media using silicon-micromachined collimating arrays

Proc. SPIE. 4616, Optical Fibers and Sensors for Medical Applications II

KEYWORDS: Scattering, Sensors, Glasses, Photons, Silicon, Light scattering, Laser scattering, Collimators, Charge-coupled devices, Tissue optics

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PROCEEDINGS ARTICLE | August 24, 2001

BiIn: a sensitive bimetallic thermal resist

Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII

KEYWORDS: Etching, Metals, Glasses, Indium, Argon ion lasers, Photoresist materials, Bismuth, Reactive ion etching, Photoresist processing, Pulsed laser operation

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PROCEEDINGS ARTICLE | June 29, 2001

Prototype laser-activated bimetallic thermal resist for microfabrication

Proc. SPIE. 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI

KEYWORDS: Photovoltaics, Lithium, Indium, Oxygen, Scanning electron microscopy, Bismuth, Microfabrication, Photoresist processing, Prototyping, Process modeling

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PROCEEDINGS ARTICLE | June 3, 1998

Laser applications to IC defect correction

Proc. SPIE. 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III

KEYWORDS: Switches, Metals, Silicon, Laser processing, Laser applications, Semiconductor lasers, Transistors, Laser cutting, Semiconducting wafers, Pulsed laser operation

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PROCEEDINGS ARTICLE | September 17, 1996

Phase-sensitive techniques applied to a micromachined vacuum sensor

Proc. SPIE. 2882, Micromachined Devices and Components II

KEYWORDS: Oxides, CMOS sensors, Sensors, Resistance, Interference (communication), Amplifiers, Phase measurement, Resistors, Signal detection, Temperature metrology

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PROCEEDINGS ARTICLE | April 8, 1996

Laser hole drilling in thick polypropylene sheets for alignment sensors

Proc. SPIE. 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics

KEYWORDS: Carbon, Microscopes, Light sources, Sensors, Argon ion lasers, Laser drilling, Charge-coupled devices, CCD image sensors, Pulsed laser operation, Camera shutters

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PROCEEDINGS ARTICLE | June 30, 1995

Integrated transducer systems

Proc. SPIE. 2634, Optoelectronic and Electronic Sensors

KEYWORDS: Optical sensors, Sensors, Silicon, Transducers, Signal processing, Magnetic sensors, Micromachining, System integration, Semiconducting wafers, Chemical fiber sensors

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Showing 5 of 88 publications

Conference Committee Involvement (4)

Image Sensors and Imaging Systems 2015

9 February 2015 | San Francisco, California, United States

Image Sensors and Imaging Systems 2014

5 February 2014 | San Francisco, California, United States

Sensors, Cameras, and Systems for Industrial/Scientific Applications XIV

6 February 2013 | Burlingame, California, United States

Sensors, Cameras, and Systems for Industrial/Scientific Applications XIII

25 January 2012 | Burlingame, California, United States

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