Prof. Glenn H. Chapman Profile

Prof. Glenn H. Chapman

Chair & Professor Engineering Science at Simon Fraser Univ

SPIE Involvement:

Author | Student Chapter CoAdvisor

Publications (90)

Proceedings Article | 25 February 2020 Presentation + Paper

Characterizing long lived intralipid-infused tissue phantoms scattering using imaging sensors

Glenn Chapman, Sean Paulsen, Yutian Zhang

Proc. SPIE. 11238, Optical Interactions with Tissue and Cells XXXI

KEYWORDS: Polymethylmethacrylate, Tissues, Scattering, Cameras, Light scattering, Laser scattering, Solids, Tissue optics, Scatter measurement, Anisotropy

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Proceedings Article | 4 March 2019 Presentation

Long lived intralipid-infused tissue phantoms: control and characterization of scattering characteristics (Conference Presentation)

Glenn Chapman, Magda Sanchez

Proc. SPIE. 10876, Optical Interactions with Tissue and Cells XXX

KEYWORDS: Biomedical optics, Tissues, Scattering, Polymers, Skin, Light scattering, Laser scattering, Optical testing, Tissue optics, Anisotropy

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Proceedings Article | 14 March 2018 Presentation

Fabricating and characterizing long lived tissue phantoms using intralipid-infused solids

Glenn Chapman, Peter Le

Proc. SPIE. 10492, Optical Interactions with Tissue and Cells XXIX

KEYWORDS: Biomedical optics, Tissues, Scattering, Light scattering, Laser scattering, Image analysis, Optical fabrication, Solids, Tissue optics, Scatter measurement

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Proceedings Article | 22 February 2018 Presentation + Paper

Detection of low-concentration ammonia using differential laser-induced fluorescence on vapochromic coordination polymers

Dawei Yin, Glenn Chapman, David Stevens, Bonnie Gray, Daniel Leznoff

Proc. SPIE. 10539, Photonic Instrumentation Engineering V

KEYWORDS: Sensors, Calibration, Polymers, Spectroscopy, Luminescence, Gases, Nitrogen, Laser induced fluorescence, Semiconductor lasers, Spectral data processing

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Proceedings Article | 18 March 2016 Presentation + Paper

Enhancing defect tolerance in periodic post microfluidic channels

Glenn Chapman, Bonnie Gray

Proc. SPIE. 9705, Microfluidics, BioMEMS, and Medical Microsystems XIV

KEYWORDS: Modeling, Microfluidics, Biomedical optics, Sensors, Particles, Silicon, Computer simulations, 3D modeling, Monte Carlo methods, Mathematics, Photomasks, Tolerancing, Statistical modeling, Fluid dynamics, Protactinium

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Proceedings Article | 24 March 2015 Paper

Modeling defect tolerance sensitivity to periodic post parameters in microfluidic channels

Mahyar Mehran, Bonnie Gray, Glenn Chapman

Proc. SPIE. 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII

KEYWORDS: MATLAB, Microfluidics, Particles, Computer simulations, 3D modeling, Monte Carlo methods, Tolerancing, Fluid dynamics, Systems modeling, Protactinium

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Proceedings Article | 13 March 2015 Paper

Enhanced correction methods for high density hot pixel defects in digital imagers

Glenn Chapman, Rahul Thomas, Rohit Thomas, Zahava Koren, Israel Koren

Proc. SPIE. 9403, Image Sensors and Imaging Systems 2015

KEYWORDS: Curium, Imaging systems, Cameras, Sensors, Calibration, Ions, Neodymium, Algorithm development, CCD image sensors, Standards development

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Proceedings Article | 7 March 2014 Paper

Calibrating bimetallic grayscale photomasks to photoresist response for precise micro-optics fabrication

Glenn Chapman, Reza Qarehbaghi, Santiago Roche

Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX

KEYWORDS: Transparency, Optical lithography, Sensors, Calibration, Glasses, Photoresist materials, Micro optics, Photomasks, Absorbance, Photoresist processing

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Proceedings Article | 6 March 2014 Paper

Modeling particle flow and blockages in microfluidic channels supported by periodic posts

Mahyar Mehran, Jorden Bryer, Glenn Chapman, Bonnie Gray

Proc. SPIE. 8976, Microfluidics, BioMEMS, and Medical Microsystems XII

KEYWORDS: MATLAB, Microfluidics, Statistical analysis, Sensors, Particles, 3D modeling, Monte Carlo methods, Tolerancing, Statistical modeling, Systems modeling

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Proceedings Article | 4 March 2014 Paper

Correcting high-density hot pixel defects in digital imagers

Glenn Chapman, Rohit Thomas, Zahava Koren, Israel Koren

Proc. SPIE. 9022, Image Sensors and Imaging Systems 2014

KEYWORDS: Curium, Data modeling, Imaging systems, Cameras, Sensors, Calibration, Photography, Image quality, CCD image sensors, Standards development

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Proceedings Article | 19 February 2013 Paper

Empirical formula for rates of hot pixel defects based on pixel size, sensor area, and ISO

Glenn Chapman, Rohit Thomas, Zahava Koren, Israel Koren

Proc. SPIE. 8659, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIV

KEYWORDS: Cell phones, Imaging systems, Cameras, Sensors, Calibration, CCD cameras, Image sensors, Charge-coupled devices, CCD image sensors, Standards development

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Proceedings Article | 8 November 2012 Paper

Bimetallic grayscale photomasks for micro-optics fabrication using dual wavelength laser writing techniques

Reza Qarehbaghi, Glenn Chapman

Proc. SPIE. 8522, Photomask Technology 2012

KEYWORDS: Optical filters, Modulation, Sensors, Argon ion lasers, Photoresist materials, Micro optics, Photomasks, Beam shaping, Binary data, Camera shutters

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Proceedings Article | 7 March 2012 Paper

Fluorescence angular domain imaging of skin tissue phantoms using intralipid-infused solids

Rongen L. Cheng, Michael Phang, Rahul Thomas, Nick Pfeiffer, Glenn Chapman, Bozena Kaminska

Proc. SPIE. 8221, Optical Interactions with Tissue and Cells XXIII

KEYWORDS: Tissues, Scattering, Skin, Luminescence, Photons, Light scattering, Collagen, Solids, Image filtering, Tissue optics

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Proceedings Article | 7 March 2012 Paper

Incoherent source angular domain imaging through complex three-dimensional scattering structures

Rongen L. Cheng, Gary Chiang, Glenn Chapman

Proc. SPIE. 8221, Optical Interactions with Tissue and Cells XXIII

KEYWORDS: Optical filters, Light emitting diodes, 3D acquisition, Scattering, Photons, Light scattering, Laser scattering, Image quality, Image filtering, 3D image processing

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Proceedings Article | 18 February 2012 Paper

Bimetallic grayscale photomasks written using flat-top beam vs. Gaussian beam

Reza Qarehbaghi, Glenn Chapman, Waris Boonyasiriwat

Proc. SPIE. 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII

KEYWORDS: Thin films, Prisms, Transparency, Gaussian beams, Sensors, Glasses, Digital imaging, Photomasks, Beam shaping, Binary data

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Proceedings Article | 15 February 2012 Paper

Projecting the rate of in-field pixel defects based on pixel size, sensor area, and ISO

Glenn Chapman, Jenny Leung, Rohit Thomas, Ana Namburete, Zahava Koren, Israel Koren

Proc. SPIE. 8298, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIII

KEYWORDS: Imaging systems, Cameras, Sensors, Calibration, Control systems, CCD cameras, Image sensors, Charge-coupled devices, Picosecond phenomena, CCD image sensors

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Proceedings Article | 14 October 2011 Paper

Improving the accuracy of the bimetallic grayscale photomasks using a feedback controlled flat-top beam

Reza Qarehbaghi, Glenn Chapman, Waris Boonyasiriwat

Proc. SPIE. 8166, Photomask Technology 2011

KEYWORDS: Transparency, Optical lithography, Sensors, Photoresist materials, Objectives, Transmittance, Photomasks, Beam shaping, Raster graphics, Binary data

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Proceedings Article | 2 March 2011 Paper

Angular-domain imaging of fluorescence sources within tissue phantoms

Rongen L. Cheng, Polly Tsui, Glenn Chapman, Reza Qarehbaghi, Nick Pfeiffer

Proc. SPIE. 7897, Optical Interactions with Tissue and Cells XXII

KEYWORDS: Tissues, Imaging systems, Scattering, Luminescence, Photons, Light scattering, Chromium, Monte Carlo methods, Collimators, Image filtering

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Proceedings Article | 2 March 2011 Paper

Optical imaging through non-transparent small aquatic creatures with angular-domain imaging

Rongen L. Cheng, Polly B. Tsui, Gary Chiang, Glenn Chapman

Proc. SPIE. 7897, Optical Interactions with Tissue and Cells XXII

KEYWORDS: Optical filters, Light sources, Imaging systems, Scattering, Photons, Light scattering, Nd:YAG lasers, Laser scattering, Semiconductor lasers, Image sensors

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Proceedings Article | 17 February 2011 Paper

Tradeoffs in imager design parameters for sensor reliability

Glenn Chapman, Jenny Leung, Rahul Thomas, Zahava Koren, Israel Koren

Proc. SPIE. 7875, Sensors, Cameras, and Systems for Industrial, Scientific, and Consumer Applications XII

KEYWORDS: Imaging systems, Cameras, Sensors, Calibration, Photography, Reliability, CCD cameras, Image sensors, Picosecond phenomena, CCD image sensors

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Proceedings Article | 17 February 2011 Paper

Simulating enhanced photo carrier collection in the multifinger photogate active pixel sensors

Phanindra Kalyanam, Glenn Chapman, Ash Parameswaran

Proc. SPIE. 7875, Sensors, Cameras, and Systems for Industrial, Scientific, and Consumer Applications XII

KEYWORDS: CMOS sensors, Sensors, Photodiodes, Computer simulations, CMOS technology, Active sensors, TCAD, Device simulation, Standards development, Absorption

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Proceedings Article | 14 February 2011 Paper

Bimetallic grayscale photomasks written using optical density feedback control

James Dykes, Reza Qarehbaghi, Glenn Chapman

Proc. SPIE. 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV

KEYWORDS: Thin films, Transparency, Optical lithography, Sensors, Argon ion lasers, Objectives, Photomasks, Absorbance, Raster graphics, Feedback control

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SPIE Journal Paper | 1 November 2010

Angular domain transillumination imaging optimization with an ultrafast gated camera

Fartash Vasefi, Mohamadreza Najiminaini, Eldon Ng, Bozena Kaminska, Glenn Chapman, Jeffrey Carson

JBO Vol. 15 Issue 06

KEYWORDS: Photons, Scattering, Light scattering, Cameras, Imaging systems, Chromium, Tissue optics, Sensors, Pulsed laser operation, Reflection

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Proceedings Article | 22 March 2010 Paper

Angle-resolved spectroscopy using a radial angular filter array

Fartash Vasefi, Mohamadreza Najiminaini, Eldon Ng, Bozena Kaminska, Haishan Zeng, Glenn Chapman, Jeffrey Carson

Proc. SPIE. 7562, Optical Interactions with Tissues and Cells XXI

KEYWORDS: Optical filters, Light sources, Imaging systems, Scattering, Spectroscopy, Silicon, Light scattering, Collimation, Diffusers, Tissue optics

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Proceedings Article | 18 March 2010 Paper

Angular domain spectroscopic imaging of turbid media using silicon micromachined microchannel arrays

Fartash Vasefi, Eldon Ng, Mohamadreza Najiminaini, Genevieve Albert, Bozena Kaminska, Glenn Chapman, Jeffrey J. Carson

Proc. SPIE. 7568, Imaging, Manipulation, and Analysis of Biomolecules, Cells, and Tissues VIII

KEYWORDS: Hyperspectral imaging, Optical filters, Tissues, Imaging systems, Spectroscopy, Photons, Light scattering, Imaging spectroscopy, Image filtering, Tissue optics

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Proceedings Article | 24 February 2010 Paper

Contrast and resolution analysis of angular domain imaging for iterative optical projection tomography reconstruction

Eldon Ng, Fartash Vasefi, Bozena Kaminska, Glenn Chapman, Jeffrey Carson

Proc. SPIE. 7557, Multimodal Biomedical Imaging V

KEYWORDS: Optical imaging, Optical filters, Detection and tracking algorithms, Imaging systems, Signal attenuation, Photons, Image resolution, Tomography, Image filtering, Reconstruction algorithms

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Proceedings Article | 23 February 2010 Paper

Spatiofrequency filters for imaging fluorescence in scattering media

Polly Tsui, Glenn Chapman, Rongen L. Cheng, Gary Chiang, Nick Pfeiffer, Bozena Kaminska

Proc. SPIE. 7562, Optical Interactions with Tissues and Cells XXI

KEYWORDS: Optical filters, Tissues, Scattering, Cameras, Luminescence, Photons, Light scattering, Image resolution, Monte Carlo methods, Image filtering

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Proceedings Article | 23 February 2010 Paper

Optical imaging of structures within highly scattering material using an incoherent beam and a spatial filter

Nick Pfeiffer, Glenn Chapman, Bozena Kaminska

Proc. SPIE. 7562, Optical Interactions with Tissues and Cells XXI

KEYWORDS: Point spread functions, Optical filters, Scattering, Spatial filters, Photons, Laser scattering, Monte Carlo methods, Collimation, Image filtering, Tissue optics

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Proceedings Article | 18 February 2010 Paper

Defect tolerance in microfluidic chambers for capacitive biosensors

Glenn Chapman, Bonnie Gray, Vijay Jain

Proc. SPIE. 7593, Microfluidics, BioMEMS, and Medical Microsystems VIII

KEYWORDS: Electronics, Microfluidics, Biomedical optics, Sensors, Electrodes, Particles, Biosensors, Capacitance, Tolerancing, Protactinium

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Proceedings Article | 26 January 2010 Paper

Analyzing the impact of ISO on digital imager defects with an automatic defect trace algorithm

Jenny Leung, Glenn Chapman, Yong Choi, Rohit Thomas, Israel Koren, Zahava Koren

Proc. SPIE. 7536, Sensors, Cameras, and Systems for Industrial/Scientific Applications XI

KEYWORDS: Defect detection, Imaging systems, Cameras, Sensors, Calibration, Photography, CCD cameras, Image sensors, Algorithm development, CCD image sensors

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Proceedings Article | 26 January 2010 Paper

Enhanced sensitivity achievement using advanced device simulation of multifinger photo gate active pixel sensors

Phanindra V. R. Kalyanam, Glenn Chapman, Ash Parameswaran

Proc. SPIE. 7536, Sensors, Cameras, and Systems for Industrial/Scientific Applications XI

KEYWORDS: CMOS sensors, Sensors, Silicon, Computer simulations, Transistors, Molybdenum, Active sensors, Device simulation, Standards development, Absorption

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SPIE Journal Paper | 1 January 2010

Angular domain fluorescence imaging for small animal research

Fartash Vasefi, Michelle Belton, Bozena Kaminska, Glenn Chapman, Jeffrey Carson

JBO Vol. 15 Issue 01

KEYWORDS: Imaging systems, Luminescence, Preclinical imaging, Tissues, Photons, Medical research, Spatial resolution, X-ray computed tomography, Image filtering, Cameras

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Proceedings Article | 23 September 2009 Paper

Enhanced laser-writing techniques for bimetallic grayscale photomasks

James Dykes, Glenn Chapman

Proc. SPIE. 7488, Photomask Technology 2009

KEYWORDS: Thin films, Optical filters, Optical lithography, Sensors, Calibration, Sputter deposition, Glasses, Indium, Argon ion lasers, Photomasks

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Proceedings Article | 10 July 2009 Paper

Angular domain optical imaging of turbid media using enhanced micro-tunnel filter arrays

Fartash Vasefi, Benny Hung, Bozena Kaminska, Glenn Chapman, Jeffrey Carson

Proc. SPIE. 7369, Diffuse Optical Imaging II

KEYWORDS: Optical imaging, Optical filters, Reflection, Imaging systems, Scattering, Sensors, Photons, Silicon, Light scattering, Image filtering

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Proceedings Article | 25 February 2009 Paper

Angular domain fluorescent lifetime imaging in turbid media

Fartash Vasefi, Eldon Ng, Bozena Kaminska, Glenn Chapman, Jeffrey J. Carson

Proc. SPIE. 7183, Multiphoton Microscopy in the Biomedical Sciences IX

KEYWORDS: Laser sources, Optical filters, Tissues, Scattering, Cameras, Luminescence, Photons, Light scattering, Picosecond phenomena, Pulsed laser operation

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Proceedings Article | 25 February 2009 Paper

Angular distribution of quasi-ballistic light measured through turbid media using angular domain optical imaging

Fartash Vasefi, Bozena Kaminska, Glenn Chapman, Jeffrey J. Carson

Proc. SPIE. 7175, Optical Interactions with Tissue and Cells XX

KEYWORDS: Optical filters, Scattering, Photons, Silicon, Light scattering, Semiconductor lasers, Image filtering, Spatial resolution, Tissue optics, Light

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Proceedings Article | 25 February 2009 Paper

Spatiofrequency filter in turbid medium enhanced by background scattered light subtraction from a deviated laser source

Polly B. Tsui, Glenn Chapman, Rongen L. Cheng, Nick Pfeiffer, Fartash Vasefi, Bozena Kaminska

Proc. SPIE. 7175, Optical Interactions with Tissue and Cells XX

KEYWORDS: Optical filters, Prisms, Scattering, Photons, Light scattering, Laser scattering, Linear filtering, Image filtering, Image enhancement, Light

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Proceedings Article | 24 February 2009 Paper

Optical characterization of the mask writing process in bimetallic grayscale photomasks

James Dykes, Glenn Chapman

Proc. SPIE. 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII

KEYWORDS: Thin films, Optical filters, Optical lithography, Sensors, Calibration, Sputter deposition, Indium, Photomasks, Bismuth, Tin

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Proceedings Article | 24 February 2009 Paper

Image contrast enhancement during time-angular domain imaging through turbid media by estimation of background scattered light

Eldon Ng, Fartash Vasefi, Bozena Kaminska, Glenn Chapman, Jeffrey J. Carson

Proc. SPIE. 7182, Imaging, Manipulation, and Analysis of Biomolecules, Cells, and Tissues VII

KEYWORDS: Optical filters, Scattering, Cameras, Microchannel plates, Photons, Light scattering, Collimation, Image enhancement, Picosecond phenomena, Image contrast enhancement

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Proceedings Article | 24 February 2009 Paper

Effect of time gating and polarization discrimination of propagating light in turbid media during angular domain imaging (ADI)

Fartash Vasefi, Eldon Ng, Bozena Kaminska, Glenn Chapman, Jeffrey J. Carson

Proc. SPIE. 7182, Imaging, Manipulation, and Analysis of Biomolecules, Cells, and Tissues VII

KEYWORDS: Optical filters, Polarization, Tissues, Scattering, Cameras, Photons, Light scattering, Laser scattering, Picosecond phenomena, Pulsed laser operation

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Proceedings Article | 24 February 2009 Paper

Angular domain optical projection tomography in turbid media

Fartash Vasefi, Bozena Kaminska, Kevin Jordan, Glenn Chapman, Jeffrey J. Carson

Proc. SPIE. 7174, Optical Tomography and Spectroscopy of Tissue VIII

KEYWORDS: Optical filters, Imaging systems, Scattering, Photons, Light scattering, Laser scattering, Semiconductor lasers, Tomography, Projection systems, Optical tomography

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Proceedings Article | 28 January 2009 Paper

The implementation and spectrum response analysis of multifinger photogate APS pixels

Jenny Leung, Michelle La Haye, Glenn Chapman, Jeff Liu, Phanindra Kalyanam, M. Parameswaran

Proc. SPIE. 7249, Sensors, Cameras, and Systems for Industrial/Scientific Applications X

KEYWORDS: CMOS sensors, Light emitting diodes, Capacitors, Sensors, Calibration, Silicon, Quantum efficiency, Transistors, Molybdenum, Absorption

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Proceedings Article | 19 January 2009 Paper

Statistical identification and analysis of defect development in digital imagers

Jenny Leung, Glenn Chapman, Zahava Koren, Israel Koren

Proc. SPIE. 7250, Digital Photography V

KEYWORDS: Statistical analysis, Defect detection, Detection and tracking algorithms, Imaging systems, Cameras, Sensors, Error analysis, Optical inspection, Image sensors, CCD image sensors

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Proceedings Article | 17 October 2008 Paper

Effects of heated substrates on bimetallic thermal resist for lithography and grayscale photomask applications

James Dykes, Polly Tsui, Jenny Leung, Glenn Chapman

Proc. SPIE. 7122, Photomask Technology 2008

KEYWORDS: Thin films, Transparency, Sensors, Calibration, Argon ion lasers, Laser development, Nd:YAG lasers, Objectives, Photomasks, Laser systems engineering

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Proceedings Article | 19 March 2008 Paper

Characterization of pixel defect development during digital imager lifetime

Jenny Leung, Jozsef Dudas, Glenn Chapman, Zahava Koren, Israel Koren

Proc. SPIE. 6816, Sensors, Cameras, and Systems for Industrial/Scientific Applications IX

KEYWORDS: Statistical analysis, Detection and tracking algorithms, Imaging systems, Cameras, Sensors, Calibration, Image processing, Error analysis, Computer simulations, Algorithm development

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Proceedings Article | 5 March 2008 Paper

Enhanced angular domain optical imaging by background scattered light subtraction from a deviated laser source

Fartash Vasefi, Glenn Chapman, Paulman Chan, Bozena Kaminska, Nick Pfeiffer

Proc. SPIE. 6854, Optical Interactions with Tissue and Cells XIX

KEYWORDS: Optical filters, Digital signal processing, Scattering, Image processing, Photons, Light scattering, Laser scattering, Image filtering, Image enhancement, Light

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Proceedings Article | 20 February 2008 Paper

Optical imaging of structures within highly scattering material using a lens and aperture to form a spatiofrequency filter

Nick Pfeiffer, Paulman Chan, Glenn Chapman, Fartash Vasefi, Bozena Kaminska

Proc. SPIE. 6854, Optical Interactions with Tissue and Cells XIX

KEYWORDS: Optical filters, Scattering, Photons, Light scattering, Laser scattering, Image resolution, Linear filtering, Image sensors, Image filtering, Tissue optics

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Proceedings Article | 6 February 2008 Paper

Enhancing direct-write laser control techniques for bimetallic grayscale photomasks

James Dykes, Calin Plesa, Glenn Chapman

Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics

KEYWORDS: Transparency, Optical lithography, Cameras, Sensors, Calibration, Argon ion lasers, Profilometers, Photomasks, Electro optics, Camera shutters

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Proceedings Article | 1 November 2007 Paper

Bimetallic thermal resists potential for double-exposure immersion lithography and grayscale photomasks

James Dykes, Calin Plesa, Chinheng Choo, Glenn Chapman

Proc. SPIE. 6730, Photomask Technology 2007

KEYWORDS: Thin films, Lithography, Transparency, Optical lithography, Sensors, Calibration, Argon ion lasers, Photodiodes, Photomasks, Immersion lithography

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Proceedings Article | 13 March 2007 Paper

Improving the optical characteristics of bimetallic grayscale photomasks

James Dykes, David Poon, Jun Wang, Jimmy Tsui, Glenn Chapman

Proc. SPIE. 6458, Photon Processing in Microelectronics and Photonics VI

KEYWORDS: Thin films, Optical filters, Cameras, Glasses, Video, Argon ion lasers, CCD cameras, Photomasks, Raster graphics, Binary data

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Proceedings Article | 20 February 2007 Paper

Identification of in-field defect development in digital image sensors

Jozsef Dudas, Linda Wu, Cory Jung, Glenn Chapman, Zahava Koren, Israel Koren

Proc. SPIE. 6502, Digital Photography III

KEYWORDS: CMOS sensors, Imaging systems, Cameras, Sensors, Calibration, Photography, Manufacturing, Digital cameras, Image sensors, CCD image sensors

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Proceedings Article | 6 February 2007 Paper

Multispectral angular domain optical tomography in scattering media with argon and diode laser sources

Paulman Chan, Fartash Vasefi, Glenn Chapman, Bozena Kaminska, Nick Pfeiffer

Proc. SPIE. 6435, Optical Interactions with Tissue and Cells XVIII

KEYWORDS: Optical filters, Tissues, Scattering, Silicon, Light scattering, Argon ion lasers, Laser scattering, Semiconductor lasers, Collimation, Image filtering

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Proceedings Article | 22 January 2007 Paper

Creation of embedded structures in SU-8

James Dykes, David Poon, Jun Wang, Dan Sameoto, Jimmy T. K. Tsui, Chinheng Choo, Glenn Chapman, Ash Parameswaren, Bonnie Gray

Proc. SPIE. 6465, Microfluidics, BioMEMS, and Medical Microsystems V

KEYWORDS: Microscopes, Quartz, Glasses, Ultraviolet radiation, Scanning electron microscopy, Photoresist materials, Bridges, Photomasks, Semiconducting wafers, Binary data

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Proceedings Article | 24 October 2006 Paper

Deep illumination angular domain imaging within highly scattering media enhanced by image processing

Fartash Vasefi, Paulman Chan, Bozena Kaminska, Glenn Chapman

Proc. SPIE. 6380, Smart Medical and Biomedical Sensor Technology IV

KEYWORDS: Optical filters, Scattering, Image processing, Photons, Silicon, Light scattering, Laser scattering, Image filtering, Image enhancement, Tissue optics

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Proceedings Article | 20 October 2006 Paper

Adding grayscale layer to chrome photomasks

David Poon, James Dykes, Chinheng Choo, Jimmy T. Tsui, Jun Wang, Glenn Chapman, Yuqiang Tu, Patrick Reynolds, Andrew Zanzal

Proc. SPIE. 6349, Photomask Technology 2006

KEYWORDS: Thin films, Reticles, Optical lithography, Calibration, Glasses, Argon ion lasers, Photoresist materials, Photomasks, Binary data, Oxidation

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Proceedings Article | 29 March 2006 Paper

Laser-induced oxidation of metallic thin films as a method for creating grayscale photomasks

Glenn Chapman, Yuqiang Tu, Chinheng Choo, Jun Wang, David Poon, Marian Chang

Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII

KEYWORDS: Thin films, Lithography, Beam splitters, Metals, Argon ion lasers, Photoresist materials, Photomasks, Raster graphics, Radium, Oxidation

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Proceedings Article | 1 March 2006 Paper

Laser-induced oxidation of Zn and Zn alloy films for direct-write grayscale photomasks

Jun Wang, Marian Chang, Yuqiang Tu, David Poon, Glenn Chapman, Chinheng Choo, Jun Peng

Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V

KEYWORDS: Oxides, Modulation, Glasses, Argon ion lasers, Zinc, Objectives, Photomasks, Raster graphics, Zinc oxide, Oxidation

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Proceedings Article | 1 March 2006 Paper

Real-time optical characterization of laser oxidation process in bimetallic direct write gray scale photomasks

David Poon, Glenn Chapman, Chinheng Choo, Marian Chang, Jun Wang, Yuqiang Tu

Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V

KEYWORDS: Thin films, Photovoltaics, Optical filters, Argon ion lasers, Photodiodes, Diodes, Photomasks, Absorbance, Camera shutters, Oxidation

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Proceedings Article | 1 March 2006 Paper

Enhanced angular domain imaging in turbid media using Gaussian line illumination

Glenn Chapman, Josna Rao, Ted C. K. Liu, Paulman K. Y. Chan, Fartash Vasefi, Bozena Kaminska, Nick Pfeiffer

Proc. SPIE. 6084, Optical Interactions with Tissue and Cells XVII

KEYWORDS: Carbon, Scattering, Sensors, Photons, Silicon, Light scattering, Laser scattering, Collimators, Beam expanders, Tissue optics

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Proceedings Article | 6 February 2006 Paper

Noise analysis of fault tolerant active pixel sensors with and without defects

Michelle La Haye, Cory Jung, Mohammad Izadi, Glenn Chapman, Karim Karim

Proc. SPIE. 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII

KEYWORDS: Signal to noise ratio, Imaging systems, Sensors, Interference (communication), Amplifiers, Photodiodes, Transistors, Resistors, Active sensors, Standards development

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Proceedings Article | 17 January 2006 Paper

Robust detection of defects in imaging arrays

Jozsef Dudas, Cory Jung, Glenn Chapman, Zahava Koren, Israel Koren

Proc. SPIE. 6059, Image Quality and System Performance III

KEYWORDS: Defect detection, Imaging systems, Sensors, Calibration, Image processing, Error analysis, Manufacturing, Computer simulations, Monte Carlo methods, Imaging arrays

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Proceedings Article | 4 November 2005 Paper

Expanding grayscale capability of direct-write grayscale photomask by using modified Bi/In compositions

David Poon, Glenn Chapman, Chinheng Choo, Jun Wang, Yuqiang Tu, Michelle La Haye

Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology

KEYWORDS: Oxides, Transparency, Gaussian beams, Glasses, Argon ion lasers, Photomasks, Absorbance, Bismuth, Absorption, Oxidation

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Proceedings Article | 27 May 2005 Paper

Inter-layer vias and TESH interconnection network for a 3-D heterogeneous sensor system on a chip

Shekhar Bhansali, Glenn Chapman, Vijay Jain

Proc. SPIE. 5796, Unattended Ground Sensor Technologies and Applications VII

KEYWORDS: Infrared sensors, Sensors, Etching, Metals, Silicon, Resistance, Signal processing, Acoustics, Semiconducting wafers, System on a chip

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Proceedings Article | 4 May 2005 Paper

Enhanced inorganic bimetallic thermal resists transparency and resolution for photomask fabrication

Glenn Chapman, David Poon, Chinheng Choo, Yuqiang Tu, James Dykes, Jun Wang, Jun Peng, Willy Lennard, Karen Kavanagh

Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII

KEYWORDS: Lithography, Transparency, Glasses, Silicon, Photoresist materials, Silicon films, Photomasks, Aluminum, Absorbance, Oxidation

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Proceedings Article | 15 April 2005 Paper

Monte Carlo simulations of the growth and decay of quasi-ballistic photon fractions with depth in an isotropic scattering medium

Nick Pfeiffer, Glenn Chapman

Proc. SPIE. 5695, Optical Interactions with Tissue and Cells XVI

KEYWORDS: Tissues, Scattering, Sensors, Single photon, Light scattering, Monte Carlo methods, Tissue optics, Photon transport, Absorption, Anisotropy

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Proceedings Article | 15 April 2005 Paper

Angular domain image detectability with changing turbid medium scattering coefficients

Glenn Chapman, Paulman Chan, Jozsef Dudas, Josna Rao, Nick Pfeiffer

Proc. SPIE. 5695, Optical Interactions with Tissue and Cells XVI

KEYWORDS: Imaging systems, Scattering, Sensors, Photons, Light scattering, Laser scattering, Image resolution, Collimators, Charge-coupled devices, Beam expanders

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Proceedings Article | 12 April 2005 Paper

Creating precise 3D microstructures using laser direct-write bimetallic thermal resist grayscale photomasks

Glenn Chapman, James Dykes, David Poon, Chinheng Choo, Jun Wang, Jun Peng, Yuqiang Tu

Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV

KEYWORDS: Lithography, Calibration, Glasses, Silicon, Photoresist materials, Silicon films, Photomasks, Raster graphics, Camera shutters, Photoresist developing

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Proceedings Article | 7 March 2005 Paper

Fault tolerant photodiode and photogate active pixel sensors

Cory Jung, Glenn Chapman, Michelle La Haye, Sunjaya Djaja, Desmond Cheung, Henry Lin, Edward Loo, Yves Audet

Proc. SPIE. 5677, Sensors and Camera Systems for Scientific and Industrial Applications VI

KEYWORDS: Microscopes, Imaging systems, Sensors, Reliability, Photodiodes, Optical testing, Optical simulations, Transistors, Active sensors, Device simulation

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Proceedings Article | 9 December 2004 Paper

Laser direct write patterned indium tin oxide films for photomasks and anisotropic resist applications

Jun Peng, Glenn Chapman, Yuqiang Tu

Proc. SPIE. 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education

KEYWORDS: Oxides, Etching, Indium, Silicon, Laser processing, Photomasks, Semiconducting wafers, Anisotropic etching, Tin, Oxidation

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Proceedings Article | 6 December 2004 Paper

Calibrating grayscale direct write bimetallic photomasks to create 3D photoresist structures

Yuqiang Tu, Glenn Chapman, James Dykes, David Poon, Chinheng Choo, Jun Peng

Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology

KEYWORDS: Transparency, Calibration, Silicon, Photoresist materials, Photomasks, Absorbance, Raster graphics, Binary data, Camera shutters, Tin

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Proceedings Article | 1 September 2004 Paper

3D heterogeneous sensor system on a chip for defense and security applications

Shekhar Bhansali, Glenn Chapman, Eby Friedman, Yehea Ismail, P. Mukund, Dennis Tebbe, Vijay Jain

Proc. SPIE. 5417, Unattended/Unmanned Ground, Ocean, and Air Sensor Technologies and Applications VI

KEYWORDS: Infrared sensors, Infrared imaging, Digital signal processing, Sensors, Silicon, 3D modeling, Analog electronics, Acoustics, System on a chip, 3D image processing

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Proceedings Article | 15 July 2004 Paper

Creating 3D structures with a direct-write grayscale photomask made from Sn/In bimetallic films

Glenn Chapman, Yuqiang Tu, Jun Peng

Proc. SPIE. 5339, Photon Processing in Microelectronics and Photonics III

KEYWORDS: Glasses, Indium, Argon ion lasers, Photoresist materials, Photomasks, Absorbance, Raster graphics, Binary data, Tin, Absorption

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Proceedings Article | 1 July 2004 Paper

Angular domain imaging of phantom objects within highly scattering mediums

Nick Pfeiffer, Bob Wai, Glenn Chapman

Proc. SPIE. 5319, Laser Interaction with Tissue and Cells XV

KEYWORDS: Optical spheres, Scattering, Sensors, Photons, Light scattering, Laser scattering, Monte Carlo methods, Collimators, Charge-coupled devices, Tissue optics

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Proceedings Article | 14 June 2004 Paper

Fault-tolerant active pixel sensors for large-area digital imaging systems

Desmond Cheung, Glenn Chapman, Sunjaya Djaja, Yves Audet, Bob Wai, Cory Jung

Proc. SPIE. 5356, Optoelectronic Integrated Circuits VI

KEYWORDS: CMOS sensors, Imaging systems, Sensors, Error analysis, Photodiodes, Transistors, CMOS technology, Signal detection, Tolerancing, Active sensors

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Proceedings Article | 14 May 2004 Paper

Inorganic Bi/In thermal resist as a high-etch-ratio patterning layer for CF4/CHF3/O2 plasma etch

Yuqiang Tu, Glenn Chapman, Jun Peng

Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI

KEYWORDS: Optical lithography, Etching, Indium, Silicon, Photoresist materials, Wet etching, Bismuth, Plasma etching, Anisotropic etching, Plasma

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Proceedings Article | 30 December 2003 Paper

Bi/In thermal resist for both Si anisotropic wet etching and Si/SiO2 plasma etching

Glenn Chapman, Yuqiang Tu, Jun Peng

Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX

KEYWORDS: Etching, Indium, Silicon, Photoresist materials, Wet etching, Bismuth, Plasma etching, Semiconducting wafers, Anisotropic etching, Plasma

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Proceedings Article | 17 December 2003 Paper

Creating direct-write gray-scale photomasks with bimetallic thin film thermal resists

Glenn Chapman, Yuqiang Tu, James Dykes, Masahiko Mio, Jun Peng

Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology

KEYWORDS: Glasses, Argon ion lasers, Semiconductor lasers, Photoresist materials, Photomasks, Absorbance, Bismuth, Raster graphics, Binary data, Absorption

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Proceedings Article | 17 October 2003 Paper

Single step direct-write photomask made from bimetallic Bi/In thermal resist

Glenn Chapman, Richard Tu

Proc. SPIE. 4977, Photon Processing in Microelectronics and Photonics II

KEYWORDS: Oxides, Quartz, Glasses, Solar cells, Silicon, Argon ion lasers, Photomasks, Absorbance, Bismuth, Absorption

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Proceedings Article | 29 July 2003 Paper

Angular domain optical imaging of structures within highly scattering material using silicon micromachined collimating arrays

Glenn Chapman, Maria Trinh, Desmond Lee, Nick Pfeiffer, Gary Chu

Proc. SPIE. 4955, Optical Tomography and Spectroscopy of Tissue V

KEYWORDS: Scattering, Sensors, Glasses, Photons, Silicon, Light scattering, Laser scattering, Monte Carlo methods, Collimators, Charge-coupled devices

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Proceedings Article | 12 June 2003 Paper

Wavelength invariant Bi/In thermal resist as a Si anisotropic etch masking layer and direct-write photomask material

Glenn Chapman, Yuqiang Tu, Jun Peng

Proc. SPIE. 5039, Advances in Resist Technology and Processing XX

KEYWORDS: Etching, Quartz, Glasses, Silicon, Argon ion lasers, Photomasks, Bismuth, Thermal modeling, Anisotropic etching, Absorption

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Proceedings Article | 15 January 2003 Paper

Bi/In as patterning and masking layers for alkaline-based Si anisotropic etching

Yuqiang Tu, Glenn Chapman

Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII

KEYWORDS: Optical lithography, Etching, Copper, Silicon, Argon ion lasers, Photoresist materials, Photomasks, Bismuth, Semiconducting wafers, Anisotropic etching

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Proceedings Article | 24 July 2002 Paper

Bi/In bimetallic thermal resists for microfabrication, photomasks, and micromachining applications

Glenn Chapman, Richard Tu, Marinko Sarunic

Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX

KEYWORDS: Etching, Copper, Silicon, Argon ion lasers, Photoresist materials, Photomasks, Bismuth, Plating, Photoresist processing, Absorption

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Proceedings Article | 18 June 2002 Paper

Bimetallic thermal activated films for microfabrication, photomasks, and data storage

Richard Tu, Glenn Chapman, Marinko Sarunic

Proc. SPIE. 4637, Photon Processing in Microelectronics and Photonics

KEYWORDS: Etching, Copper, Nickel, Nd:YAG lasers, Photomasks, Bismuth, Plating, Photoresist processing, Semiconducting wafers, Absorption

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Proceedings Article | 26 March 2002 Paper

Optical imaging of objects within highly scattering media using silicon-micromachined collimating arrays

Glenn Chapman, Moninder Tank, Gary Chu, Maria Trinh

Proc. SPIE. 4616, Optical Fibers and Sensors for Medical Applications II

KEYWORDS: Scattering, Sensors, Glasses, Photons, Silicon, Light scattering, Laser scattering, Collimators, Charge-coupled devices, Tissue optics

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Proceedings Article | 24 August 2001 Paper

BiIn: a sensitive bimetallic thermal resist

Glenn Chapman, Richard Tu, Marinko Sarunic, Jagjot Dhaliwal

Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII

KEYWORDS: Etching, Metals, Glasses, Indium, Argon ion lasers, Photoresist materials, Bismuth, Reactive ion etching, Photoresist processing, Pulsed laser operation

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Proceedings Article | 29 June 2001 Paper

Prototype laser-activated bimetallic thermal resist for microfabrication

Marinko Sarunic, Glenn Chapman, Richard Tu

Proc. SPIE. 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI

KEYWORDS: Photovoltaics, Lithium, Indium, Oxygen, Scanning electron microscopy, Bismuth, Microfabrication, Photoresist processing, Prototyping, Process modeling

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Proceedings Article | 3 June 1998 Paper

Laser applications to IC defect correction

Glenn Chapman

Proc. SPIE. 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III

KEYWORDS: Switches, Metals, Silicon, Laser processing, Laser applications, Semiconductor lasers, Transistors, Laser cutting, Semiconducting wafers, Pulsed laser operation

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Proceedings Article | 17 September 1996 Paper

Phase-sensitive techniques applied to a micromachined vacuum sensor

Glenn Chapman, N. Sawadsky, P. Juneja

Proc. SPIE. 2882, Micromachined Devices and Components II

KEYWORDS: Oxides, CMOS sensors, Sensors, Resistance, Interference (communication), Amplifiers, Phase measurement, Resistors, Signal detection, Temperature metrology

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Proceedings Article | 8 April 1996 Paper

Laser hole drilling in thick polypropylene sheets for alignment sensors

D. Bergen, Glenn Chapman, Taranjit Samra, T. Weeks

Proc. SPIE. 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics

KEYWORDS: Carbon, Microscopes, Light sources, Sensors, Argon ion lasers, Laser drilling, Charge-coupled devices, CCD image sensors, Pulsed laser operation, Camera shutters

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Proceedings Article | 30 June 1995 Paper

Integrated transducer systems

Marek Syrzycki, M. Parameswaran, Glenn Chapman

Proc. SPIE. 2634, Optoelectronic and Electronic Sensors

KEYWORDS: Optical sensors, Sensors, Silicon, Transducers, Signal processing, Magnetic sensors, Micromachining, System integration, Semiconducting wafers, Chemical fiber sensors

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Showing 5 of 90 publications

Conference Committee Involvement (4)

Image Sensors and Imaging Systems 2015

9 February 2015 | San Francisco, California, United States

Image Sensors and Imaging Systems 2014

5 February 2014 | San Francisco, California, United States

Sensors, Cameras, and Systems for Industrial/Scientific Applications XIV

6 February 2013 | Burlingame, California, United States

Sensors, Cameras, and Systems for Industrial/Scientific Applications XIII

25 January 2012 | Burlingame, California, United States

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