Dr. Gnanavel Thirunavukkarasu
at Univ of York
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 25 August 2015 Paper
Proceedings Volume 9581, 95810C (2015) https://doi.org/10.1117/12.2187859
KEYWORDS: Electron beam lithography, Aluminum, Electron beams, Metamaterials, Transmission electron microscopy, Spatial frequencies, Holography, Photomasks, Electroluminescent displays, Product engineering

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